Fabrication of Three-Dimensional Reflective White Pattern using Dry-Film Resist

White reflective patterns are very difficult to fabricate, due to the scattering and reflection of light, especially when the pattern size goes down to micron size. A reflective white barrier structure of height $50{\mu}m$ and width $80{\mu}m$ was fabricated using dry-film resist as an intermediate...

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Veröffentlicht in:Journal of the Optical Society of Korea 2015, Vol.19 (1), p.80-83
Hauptverfasser: Jun, Hwa Joon, Na, Dae Gil, Kwon, Young Hoon, Kwon, Jin Hyuk
Format: Artikel
Sprache:kor
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Zusammenfassung:White reflective patterns are very difficult to fabricate, due to the scattering and reflection of light, especially when the pattern size goes down to micron size. A reflective white barrier structure of height $50{\mu}m$ and width $80{\mu}m$ was fabricated using dry-film resist as an intermediate reverse pattern. The reverse dry-film resist pattern was coated with an $SiO_2$ layer by sputtering, to protect the resist from chemical attack by the radical molecules in UV white resin. The UV white resin was applied on the dry-film resist pattern and then cured with ultraviolet light. The fine three-dimensional reflective patterns were finished by removing the dry-film resist.
ISSN:1226-4776
2093-6885