The Micro Pirani Gauge with Low Noise CDS-CTIA for In-Situ Vacuum Monitoring

The Micro Pirani Gauge with Low Noise CDS-CTIA for In-Situ Vacuum Monitoring

A resistive micro Pirani gauge using amorphous silicon (a-Si) thin membrane is proposed. The proposed Pirani gauge can be easily integrated with the other process-compatible membrane-type sensors, and can be applicable for in-situ vacuum monitoring inside the vacuum package without an additional pro...

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Veröffentlicht in:Journal of semiconductor technology and science 2014, Vol.14 (6), p.733-740
Hauptverfasser: Kim, Gyungtae, Seok, Changho, Kim, Taehyun, Park, Jae Hong, Kim, Heeyeoun, Ko, Hyoungho
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container_issue 6
container_start_page 733
container_title Journal of semiconductor technology and science
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creator Kim, Gyungtae
Seok, Changho
Kim, Taehyun
Park, Jae Hong
Kim, Heeyeoun
Ko, Hyoungho
description A resistive micro Pirani gauge using amorphous silicon (a-Si) thin membrane is proposed. The proposed Pirani gauge can be easily integrated with the other process-compatible membrane-type sensors, and can be applicable for in-situ vacuum monitoring inside the vacuum package without an additional process. The vacuum level is measured by the resistance changes of the membrane using the low noise correlated double sampling (CDS) capacitive trans-impedance amplifier (CTIA). The measured vacuum range of the Pirani gauge is 0.1 to 10 Torr. The sensitivity and non-linearity are measured to be 78 mV / Torr and 0.5% in the pressure range of 0.1 to 10 Torr. The output noise level is measured to be $268{\mu}V_{rms}$ in 0.5 Hz to 50 Hz, which is 41.2% smaller than conventional CTIA.
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fullrecord <record><control><sourceid>kisti</sourceid><recordid>TN_cdi_kisti_ndsl_JAKO201402148669668</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JAKO201402148669668</sourcerecordid><originalsourceid>FETCH-kisti_ndsl_JAKO2014021486696683</originalsourceid><addsrcrecordid>eNqNyrsOgjAUANAOmkiUf7iLYxOeBUaCLxTUBOJKKvK4EdukhfD7Ln6A01nOghi2H4XUZn6wIqbW-LR81w0YCwKDZGXfQI61knBHxQXCkU9dAzOOPWRyhqtE3UCyK2hSpjG0UkEqaIHjBA9eT9MHcilwlApFtyHLlg-6MX-uyfawL5MTfaMesRIvPVTn-HJzLNuzHNsLGYsYC91_3xfrQTnZ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>The Micro Pirani Gauge with Low Noise CDS-CTIA for In-Situ Vacuum Monitoring</title><source>Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals</source><source>Free Full-Text Journals in Chemistry</source><creator>Kim, Gyungtae ; Seok, Changho ; Kim, Taehyun ; Park, Jae Hong ; Kim, Heeyeoun ; Ko, Hyoungho</creator><creatorcontrib>Kim, Gyungtae ; Seok, Changho ; Kim, Taehyun ; Park, Jae Hong ; Kim, Heeyeoun ; Ko, Hyoungho</creatorcontrib><description>A resistive micro Pirani gauge using amorphous silicon (a-Si) thin membrane is proposed. The proposed Pirani gauge can be easily integrated with the other process-compatible membrane-type sensors, and can be applicable for in-situ vacuum monitoring inside the vacuum package without an additional process. The vacuum level is measured by the resistance changes of the membrane using the low noise correlated double sampling (CDS) capacitive trans-impedance amplifier (CTIA). The measured vacuum range of the Pirani gauge is 0.1 to 10 Torr. The sensitivity and non-linearity are measured to be 78 mV / Torr and 0.5% in the pressure range of 0.1 to 10 Torr. The output noise level is measured to be $268{\mu}V_{rms}$ in 0.5 Hz to 50 Hz, which is 41.2% smaller than conventional CTIA.</description><identifier>ISSN: 1598-1657</identifier><language>kor</language><ispartof>Journal of semiconductor technology and science, 2014, Vol.14 (6), p.733-740</ispartof><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,314,778,782,883,4012</link.rule.ids></links><search><creatorcontrib>Kim, Gyungtae</creatorcontrib><creatorcontrib>Seok, Changho</creatorcontrib><creatorcontrib>Kim, Taehyun</creatorcontrib><creatorcontrib>Park, Jae Hong</creatorcontrib><creatorcontrib>Kim, Heeyeoun</creatorcontrib><creatorcontrib>Ko, Hyoungho</creatorcontrib><title>The Micro Pirani Gauge with Low Noise CDS-CTIA for In-Situ Vacuum Monitoring</title><title>Journal of semiconductor technology and science</title><addtitle>Journal of semiconductor technology and science</addtitle><description>A resistive micro Pirani gauge using amorphous silicon (a-Si) thin membrane is proposed. The proposed Pirani gauge can be easily integrated with the other process-compatible membrane-type sensors, and can be applicable for in-situ vacuum monitoring inside the vacuum package without an additional process. The vacuum level is measured by the resistance changes of the membrane using the low noise correlated double sampling (CDS) capacitive trans-impedance amplifier (CTIA). The measured vacuum range of the Pirani gauge is 0.1 to 10 Torr. The sensitivity and non-linearity are measured to be 78 mV / Torr and 0.5% in the pressure range of 0.1 to 10 Torr. The output noise level is measured to be $268{\mu}V_{rms}$ in 0.5 Hz to 50 Hz, which is 41.2% smaller than conventional CTIA.</description><issn>1598-1657</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><sourceid>JDI</sourceid><recordid>eNqNyrsOgjAUANAOmkiUf7iLYxOeBUaCLxTUBOJKKvK4EdukhfD7Ln6A01nOghi2H4XUZn6wIqbW-LR81w0YCwKDZGXfQI61knBHxQXCkU9dAzOOPWRyhqtE3UCyK2hSpjG0UkEqaIHjBA9eT9MHcilwlApFtyHLlg-6MX-uyfawL5MTfaMesRIvPVTn-HJzLNuzHNsLGYsYC91_3xfrQTnZ</recordid><startdate>2014</startdate><enddate>2014</enddate><creator>Kim, Gyungtae</creator><creator>Seok, Changho</creator><creator>Kim, Taehyun</creator><creator>Park, Jae Hong</creator><creator>Kim, Heeyeoun</creator><creator>Ko, Hyoungho</creator><scope>JDI</scope></search><sort><creationdate>2014</creationdate><title>The Micro Pirani Gauge with Low Noise CDS-CTIA for In-Situ Vacuum Monitoring</title><author>Kim, Gyungtae ; Seok, Changho ; Kim, Taehyun ; Park, Jae Hong ; Kim, Heeyeoun ; Ko, Hyoungho</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-kisti_ndsl_JAKO2014021486696683</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>kor</language><creationdate>2014</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Kim, Gyungtae</creatorcontrib><creatorcontrib>Seok, Changho</creatorcontrib><creatorcontrib>Kim, Taehyun</creatorcontrib><creatorcontrib>Park, Jae Hong</creatorcontrib><creatorcontrib>Kim, Heeyeoun</creatorcontrib><creatorcontrib>Ko, Hyoungho</creatorcontrib><collection>KoreaScience</collection><jtitle>Journal of semiconductor technology and science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kim, Gyungtae</au><au>Seok, Changho</au><au>Kim, Taehyun</au><au>Park, Jae Hong</au><au>Kim, Heeyeoun</au><au>Ko, Hyoungho</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>The Micro Pirani Gauge with Low Noise CDS-CTIA for In-Situ Vacuum Monitoring</atitle><jtitle>Journal of semiconductor technology and science</jtitle><addtitle>Journal of semiconductor technology and science</addtitle><date>2014</date><risdate>2014</risdate><volume>14</volume><issue>6</issue><spage>733</spage><epage>740</epage><pages>733-740</pages><issn>1598-1657</issn><abstract>A resistive micro Pirani gauge using amorphous silicon (a-Si) thin membrane is proposed. The proposed Pirani gauge can be easily integrated with the other process-compatible membrane-type sensors, and can be applicable for in-situ vacuum monitoring inside the vacuum package without an additional process. The vacuum level is measured by the resistance changes of the membrane using the low noise correlated double sampling (CDS) capacitive trans-impedance amplifier (CTIA). The measured vacuum range of the Pirani gauge is 0.1 to 10 Torr. The sensitivity and non-linearity are measured to be 78 mV / Torr and 0.5% in the pressure range of 0.1 to 10 Torr. The output noise level is measured to be $268{\mu}V_{rms}$ in 0.5 Hz to 50 Hz, which is 41.2% smaller than conventional CTIA.</abstract><oa>free_for_read</oa></addata></record>
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title The Micro Pirani Gauge with Low Noise CDS-CTIA for In-Situ Vacuum Monitoring
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-16T15%3A32%3A47IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-kisti&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=The%20Micro%20Pirani%20Gauge%20with%20Low%20Noise%20CDS-CTIA%20for%20In-Situ%20Vacuum%20Monitoring&rft.jtitle=Journal%20of%20semiconductor%20technology%20and%20science&rft.au=Kim,%20Gyungtae&rft.date=2014&rft.volume=14&rft.issue=6&rft.spage=733&rft.epage=740&rft.pages=733-740&rft.issn=1598-1657&rft_id=info:doi/&rft_dat=%3Ckisti%3EJAKO201402148669668%3C/kisti%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true