Physical and Chemical Investigation of Substrate Temperature Dependence of Zirconium Oxide Films on Si(100)

We report here the surface behavior of zirconium oxide deposited on Si(100) substrate depending on the different substrate temperatures. The zirconium oxide thin films were successfully deposited on the Si(100) surfaces applying radio-frequency (RF) magnetron sputtering process. The obtained zirconi...

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Veröffentlicht in:	Bulletin of the Korean Chemical Society 2009, Vol.30 (11), p.2729-2734
Hauptverfasser:	Chun, Mi-Sun, Moon, Myung-Jun, Park, Ju-Yun, Kang, Yong-Cheol
Format:	Artikel
Sprache:	kor
Online-Zugang:	Volltext
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