A Study on the Dip-pen Nanolithography Process and Fabrication of Optical Waveguide for the Application of Biosensor

Photonic crystal structures have been received considerable attention due to their high optical sensitivity. One of the techniques to construct their structure is the dip-pen lithography (DPN) process, which requires a nano-scale resolution and high reliability. In this paper, we propose a two dimen...

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Veröffentlicht in:	Transactions on electrical and electronic materials 2008-08, Vol.9 (4), p.163-168
Hauptverfasser:	Kim, Jun-Hyong, Yang, Hoe-Young, Yu, Chong-Hee, Lee, Hyun-Yong
Format:	Artikel
Sprache:	kor
Schlagworte:	Dip-pen nanolithography Mach-zehnder interferometer Optical biosensor Photonic crystal
Online-Zugang:	Volltext
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