Effects of Polymer Adsorption on Stabilities and CMP Performance of Ceria Abrasive Particles
In this paper we present that the effects of polymer adsorption on stabilities and CMP performance of ceria abrasive particles. Characterization of ceria abrasive particles in the presence of poly(vinyl pyrrolidone) (PVP) was performed by the measurements of adsorbed amounts of PVP, average sizes, a...
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| Veröffentlicht in: | Transactions on electrical and electronic materials 2006, Vol.7 (3), p.112-117 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | kor |
| Online-Zugang: | Volltext |
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