Fabrication, Estimation and Trypsin Digestion Experiment of the Thermally Isolated Micro Teactor for Bio-chemical Reaction

This paper describes design, fabrication, and application of the silicon based temperature controllable micro reactor. In order to achieve fast temperature variation and low energy consumption, reaction chamber of the micro reactor was thermally isolated by etching the highly conductive silicon arou...

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Veröffentlicht in:	Journal of semiconductor technology and science 2005, Vol.5 (3), p.149-158
Hauptverfasser:	Sim, Tae-Seok, Kim, Dae-Weon, Kim, Eun-Mi, Joo, Hwang-Soo, Lee, Kook-Nyung, Kim, Byung-Gee, Kim, Yong-Hyup, Kim, Yong-Kweon
Format:	Artikel
Sprache:	kor
Online-Zugang:	Volltext
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