Mathematical Modeling of Electrostatic MEMS with Tailored Dielectric Properties

The "pull-in" or "snap-down" instability in electrostatically actuated microelectromechanical systems (MEMS) presents a ubiquitous challenge in MEMS technology of great importance. In this instability, when applied voltages are increased beyond a critical value, there is no longe...

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Veröffentlicht in:	SIAM journal on applied mathematics 2001-12, Vol.62 (3), p.888-908
1. Verfasser:	Pelesko, John A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Critical points Dielectric materials Dielectric properties Electric potential Electrostatics Microelectromechanical systems Narrative devices Permittivity Sensors Tailoring
Online-Zugang:	Volltext
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