Metastability and the Casimir effect in micromechanical systems

Electrostatic and Casimir interactions limit the range of positional stability of electrostatically actuated or capacitively coupled mechanical devices. We investigate this range experimentally for a generic system consisting of a doubly clamped Au suspended beam, capacitively coupled to an adjacent...

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Veröffentlicht in:	Europhysics letters 2001-04, Vol.54 (2), p.220-226
Hauptverfasser:	Buks, E, Roukes, M. L
Format:	Artikel
Sprache:	eng
Schlagworte:	68.10.Cr 68.35.Gy 87.80.Mj Applied sciences Exact sciences and technology Mechanical engineering. Machine design Precision engineering, watch making
Online-Zugang:	Volltext
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