Tailoring strain in the SrTiO3 compound by low-energy He+ irradiation
The ability to generate a change of the lattice parameter in a near-surface layer of a controllable thickness by ion implantation of strontium titanate is reported here using low-energy He+ ions. The induced strain follows a distribution within a typical near-surface layer of 200 nm as obtained from...
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Veröffentlicht in: | Europhysics letters 2010-11, Vol.92 (3), p.36005 |
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container_title | Europhysics letters |
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creator | Autier-Laurent, S Plantevin, O Lecoeur, P Decamps, B Gentils, A Bachelet, C Kaitasov, O Baldinozzi, G |
description | The ability to generate a change of the lattice parameter in a near-surface layer of a controllable thickness by ion implantation of strontium titanate is reported here using low-energy He+ ions. The induced strain follows a distribution within a typical near-surface layer of 200 nm as obtained from structural analysis. Due to the clamping effect from the underlying layer, only perpendicular expansion is observed. Maximum distortions up to 5–7% are obtained with no evidence of amorphisation at fluences of 1016 He+ ions/cm2 and ion energies in the range 10–30 keV. |
doi_str_mv | 10.1209/0295-5075/92/36005 |
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The induced strain follows a distribution within a typical near-surface layer of 200 nm as obtained from structural analysis. Due to the clamping effect from the underlying layer, only perpendicular expansion is observed. 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subjects | 61.05.cp 68.35.Gy 68.55.Ln Chemical Sciences Condensed Matter Material chemistry Materials Science Physics |
title | Tailoring strain in the SrTiO3 compound by low-energy He+ irradiation |
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