Analysis of particulates generated in a radiofrequencymethane plasma by laser light scattering and optical spectroscopy

The generation and the behavior of amorphous hydrogenated carbon particulates have been investigated in a pure methane low pressure radiofrequency discharge at 13.56 MHz. In the plasma, the formation and the presence of two kinds of particulates have been evidenced by use of laser light scattering....

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Veröffentlicht in:	European physical journal. Applied physics 1999-10, Vol.8 (1), p.53-59
Hauptverfasser:	Géraud-Grenier, I., Massereau-Guilbaud, V., Plain, A.
Format:	Artikel
Sprache:	eng
Schlagworte:	52.25.Rv 61.46.+w 81.20.Ev
Online-Zugang:	Volltext
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