Thermal Boundary Resistance of W/Al2O3 Interface in W/Al2O3/W Three-Layered Thin Film and Its Dependence on Morphology

We investigated the dependence of the thermal boundary resistance of the W/Al 2 O 3 interface in W/Al 2 O 3 /W three-layered thin films on the interface morphology. The layered structures, Al 2 O 3 thin layers with thicknesses from 1 to 50 nm covered by top and bottom W layers with a thickness of 10...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Jpn J Appl Phys 2013-06, Vol.52 (6), p.065802-065802-5
Hauptverfasser:	Kawasaki, Shizuka, Yamashita, Yuichiro, Oka, Nobuto, Yagi, Takashi, Jia, Junjun, Taketoshi, Naoyuki, Baba, Tetsuya, Shigesato, Yuzo
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!