Effect of Nucleation Layer of Photocatalytic TiO2 Thin Film Prepared by Two-Step Deposition Using Radical-Assisted Sputtering

A nucleation layer forms in the nucleation step (the first step) of a two-step deposition method that we have developed for forming TiO 2 thin films. We found that the nucleation layer affects the crystallinity of TiO 2 thin films during the growth step (the second step). The crystallinity of the gr...

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Veröffentlicht in:	Jpn J Appl Phys 2012-04, Vol.51 (4), p.045504-045504-4
Hauptverfasser:	Noguchi, Daisuke, Higashimaru, Yukie, Eto, Tomohiro, Kodama, Kazuya, Fukudome, Shoji, Kawano, Yoshihiko, Sei, Fumihiro, Siono, Ichiro
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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