Control of Powder Quality as a Method of Improving the Dielectric Properties of (Ba0.6,Sr0.4)TiO3 Thick Films Fabricated by Aerosol Deposition Method
(Ba 0.6 ,Sr 0.4 )TiO 3 (BST60) thick films were fabricated on Cu substrates by aerosol deposition (AD) method. The quality of the raw powder was checked and optimized to increase the dielectric constant of the fabricated films without the need of a post-film-formation annealing procedure. The carbon...
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| Veröffentlicht in: | Jpn J Appl Phys 2010-09, Vol.49 (9), p.09MA13-09MA13-5 |
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| Format: | Artikel |
| Sprache: | eng |
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