Integrated SiO2/SiON/SiO2 Thermo-Optical Switch Based on the Multimode Interference Effect

Integrated SiO2/SiON/SiO2 Thermo-Optical Switch Based on the Multimode Interference Effect

We propose the design of an integrated SiO 2 /SiON/SiO 2 $2 \times 2$ multimode interference (MMI) based optical switch. The entire switching mechanism is based on the thermo-optic (TO) effect of SiO 2 /SiON dielectric layers. The heating power of ${\sim}0.89$ W is required to switch the optical bea...

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Veröffentlicht in:Jpn J Appl Phys 2010-04, Vol.49 (4), p.04DG21-04DG21-5
Hauptverfasser: Chuang, Ricky W, Hsu, Mao-Teng, Liao, Zhen-Liang
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Hsu, Mao-Teng
Liao, Zhen-Liang
description We propose the design of an integrated SiO 2 /SiON/SiO 2 $2 \times 2$ multimode interference (MMI) based optical switch. The entire switching mechanism is based on the thermo-optic (TO) effect of SiO 2 /SiON dielectric layers. The heating power of ${\sim}0.89$ W is required to switch the optical beam from bar to cross state. The experimental crosstalk of the switch as determined between the cross and bar states is in the excess of 12 dB. Furthermore, the rise and fall times of approximately 314 \mbox{$\mu$}s are also experimentally realized for this device.
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title Integrated SiO2/SiON/SiO2 Thermo-Optical Switch Based on the Multimode Interference Effect
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