Density evaluation of remotely-supplied hydrogen radicals produced via tungsten filament method for SiCl4 reduction

Effect of the hydrogen radical on the reduction of a silicon tetrachloride (SiCl4) source was studied. The hydrogen radicals were generated using a tungsten (W) filament in a generation chamber, and were remotely supplied to another reaction chamber. The density of the hydrogen radical was estimated...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2018-05, Vol.57 (5)
Hauptverfasser:	Dahmani, Fatima Zohra, Okamoto, Yuji, Tsutsumi, Daiki, Ishigaki, Takamasa, Koinuma, Hideomi, Hamzaoui, Saad, Flazi, Samir, Sumiya, Masatomo
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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