Observation of nanometer-sized crystalline grooves in as-grown β-Ga2O3 single crystals

On the surface of as-grown β-Ga2O3 single crystals that are cut and polished, we found nanometer-sized grooves elongated in the [001] direction. We confirmed that these grooves terminate within the crystals in the [010] direction. This proves that the grooves are different from micropipes penetrating crystals. Their typical length and width are 50-1200 nm in the [001] direction and ∼40 nm in the [100] direction, respectively. The grooves tend to form an array in the [001] direction. The type of nanometer-sized grooves should be essentially different from etch pits.