Direct writing of Cu-based micro-temperature detectors using femtosecond laser reduction of CuO nanoparticles

Cu-based micro-temperature detectors were fabricated using femtosecond laser reduction of CuO nanoparticles. Cu-based microstructures were directly created by laser scanning on a CuO nanoparticle solution film. Cu-rich and Cu2O-rich microstructures were selectively formed to electrically connect two Cu thin-film electrodes for use in temperature detectors. Cu-rich and Cu2O-rich micro-temperature detectors were fabricated at scanning speeds of 500 and 1000 µm/s, respectively, at a pulse energy of 1.2 nJ. The temperature coefficient of resistance values of the Cu-rich and Cu2O-rich microstructures were positive and negative, respectively; these temperature behaviors are typical of metal and semiconductor materials, respectively.