Photonic metasurface made of array of lens-like SiGe Mie resonators formed on (100) Si substrate via dewetting

Photonic metasurface made of array of lens-like SiGe Mie resonators formed on (100) Si substrate via dewetting

Metasurfaces consisting of arrays of high-index Mie resonators concentrating/redirecting light are important for integrated optics, photodetectors, and solar cells. Herein, we report the optical properties of low-Ge-content SiGe lens-like Mie resonator island arrays fabricated via dewetting during G...

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Veröffentlicht in:Applied physics express 2017-12, Vol.10 (12), p.125501
Hauptverfasser: Poborchii, Vladimir, Shklyaev, Alexander, Bolotov, Leonid, Uchida, Noriyuki, Tada, Tetsuya, Utegulov, Zhandos N.
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container_issue 12
container_start_page 125501
container_title Applied physics express
container_volume 10
creator Poborchii, Vladimir
Shklyaev, Alexander
Bolotov, Leonid
Uchida, Noriyuki
Tada, Tetsuya
Utegulov, Zhandos N.
description Metasurfaces consisting of arrays of high-index Mie resonators concentrating/redirecting light are important for integrated optics, photodetectors, and solar cells. Herein, we report the optical properties of low-Ge-content SiGe lens-like Mie resonator island arrays fabricated via dewetting during Ge deposition on a Si(100) surface at approximately 900 °C. We observe enhancement of the Si interaction with light owing to the efficient island-induced light concentration in the submicron-depth Si layer, which is mediated by both near-field Mie resonance leaking into the substrate and far-field light focusing. Such metasurfaces can improve the Si photodetector and solar-cell performance.
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fullrecord <record><control><sourceid>iop_cross</sourceid><recordid>TN_cdi_iop_journals_10_7567_APEX_10_125501</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>AP170743</sourcerecordid><originalsourceid>FETCH-LOGICAL-c374t-794ad2c61b01939931b42ba7a706398c8b615d9fbfe1087e602896502f24264e3</originalsourceid><addsrcrecordid>eNp1kMFLwzAYxYMoOKdXzzk6oTNJ2yQ9jjGnMHGggreStl80c21Kkqn7723p8KSn7z34vcfHQ-iSkqlIubiZrRev085QlqaEHqERlZJFREh-_KuFPEVn3m8I4UlM-Qg163cbbGNKXENQfue0KgHXqgJsNVbOqX0vttD4aGs-AD-ZJeAHA9iBt40K1nmsrauhwrbBV5SQScdgvyt8cCoA_jQKV_AFIZjm7RydaLX1cHG4Y_Ryu3ie30Wrx-X9fLaKylgkIRJZoipWcloQmsVZFtMiYYUSShAeZ7KUBadplelCAyVSACdMZjwlTLOE8QTiMZoOvaWz3jvQeetMrdw-pyTv18r7tXozrNUFJkPA2Dbf2J1ruvdy1cL3AB24vK10x17_wf5T_APBA3cb</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Photonic metasurface made of array of lens-like SiGe Mie resonators formed on (100) Si substrate via dewetting</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>Poborchii, Vladimir ; Shklyaev, Alexander ; Bolotov, Leonid ; Uchida, Noriyuki ; Tada, Tetsuya ; Utegulov, Zhandos N.</creator><creatorcontrib>Poborchii, Vladimir ; Shklyaev, Alexander ; Bolotov, Leonid ; Uchida, Noriyuki ; Tada, Tetsuya ; Utegulov, Zhandos N.</creatorcontrib><description>Metasurfaces consisting of arrays of high-index Mie resonators concentrating/redirecting light are important for integrated optics, photodetectors, and solar cells. Herein, we report the optical properties of low-Ge-content SiGe lens-like Mie resonator island arrays fabricated via dewetting during Ge deposition on a Si(100) surface at approximately 900 °C. We observe enhancement of the Si interaction with light owing to the efficient island-induced light concentration in the submicron-depth Si layer, which is mediated by both near-field Mie resonance leaking into the substrate and far-field light focusing. Such metasurfaces can improve the Si photodetector and solar-cell performance.</description><identifier>ISSN: 1882-0778</identifier><identifier>EISSN: 1882-0786</identifier><identifier>DOI: 10.7567/APEX.10.125501</identifier><identifier>CODEN: APEPC4</identifier><language>eng</language><publisher>The Japan Society of Applied Physics</publisher><ispartof>Applied physics express, 2017-12, Vol.10 (12), p.125501</ispartof><rights>2017 The Japan Society of Applied Physics</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c374t-794ad2c61b01939931b42ba7a706398c8b615d9fbfe1087e602896502f24264e3</citedby><cites>FETCH-LOGICAL-c374t-794ad2c61b01939931b42ba7a706398c8b615d9fbfe1087e602896502f24264e3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.7567/APEX.10.125501/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,780,784,27915,27916,53837,53884</link.rule.ids></links><search><creatorcontrib>Poborchii, Vladimir</creatorcontrib><creatorcontrib>Shklyaev, Alexander</creatorcontrib><creatorcontrib>Bolotov, Leonid</creatorcontrib><creatorcontrib>Uchida, Noriyuki</creatorcontrib><creatorcontrib>Tada, Tetsuya</creatorcontrib><creatorcontrib>Utegulov, Zhandos N.</creatorcontrib><title>Photonic metasurface made of array of lens-like SiGe Mie resonators formed on (100) Si substrate via dewetting</title><title>Applied physics express</title><addtitle>Appl. Phys. Express</addtitle><description>Metasurfaces consisting of arrays of high-index Mie resonators concentrating/redirecting light are important for integrated optics, photodetectors, and solar cells. Herein, we report the optical properties of low-Ge-content SiGe lens-like Mie resonator island arrays fabricated via dewetting during Ge deposition on a Si(100) surface at approximately 900 °C. We observe enhancement of the Si interaction with light owing to the efficient island-induced light concentration in the submicron-depth Si layer, which is mediated by both near-field Mie resonance leaking into the substrate and far-field light focusing. Such metasurfaces can improve the Si photodetector and solar-cell performance.</description><issn>1882-0778</issn><issn>1882-0786</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><recordid>eNp1kMFLwzAYxYMoOKdXzzk6oTNJ2yQ9jjGnMHGggreStl80c21Kkqn7723p8KSn7z34vcfHQ-iSkqlIubiZrRev085QlqaEHqERlZJFREh-_KuFPEVn3m8I4UlM-Qg163cbbGNKXENQfue0KgHXqgJsNVbOqX0vttD4aGs-AD-ZJeAHA9iBt40K1nmsrauhwrbBV5SQScdgvyt8cCoA_jQKV_AFIZjm7RydaLX1cHG4Y_Ryu3ie30Wrx-X9fLaKylgkIRJZoipWcloQmsVZFtMiYYUSShAeZ7KUBadplelCAyVSACdMZjwlTLOE8QTiMZoOvaWz3jvQeetMrdw-pyTv18r7tXozrNUFJkPA2Dbf2J1ruvdy1cL3AB24vK10x17_wf5T_APBA3cb</recordid><startdate>20171201</startdate><enddate>20171201</enddate><creator>Poborchii, Vladimir</creator><creator>Shklyaev, Alexander</creator><creator>Bolotov, Leonid</creator><creator>Uchida, Noriyuki</creator><creator>Tada, Tetsuya</creator><creator>Utegulov, Zhandos N.</creator><general>The Japan Society of Applied Physics</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20171201</creationdate><title>Photonic metasurface made of array of lens-like SiGe Mie resonators formed on (100) Si substrate via dewetting</title><author>Poborchii, Vladimir ; Shklyaev, Alexander ; Bolotov, Leonid ; Uchida, Noriyuki ; Tada, Tetsuya ; Utegulov, Zhandos N.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c374t-794ad2c61b01939931b42ba7a706398c8b615d9fbfe1087e602896502f24264e3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Poborchii, Vladimir</creatorcontrib><creatorcontrib>Shklyaev, Alexander</creatorcontrib><creatorcontrib>Bolotov, Leonid</creatorcontrib><creatorcontrib>Uchida, Noriyuki</creatorcontrib><creatorcontrib>Tada, Tetsuya</creatorcontrib><creatorcontrib>Utegulov, Zhandos N.</creatorcontrib><collection>CrossRef</collection><jtitle>Applied physics express</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Poborchii, Vladimir</au><au>Shklyaev, Alexander</au><au>Bolotov, Leonid</au><au>Uchida, Noriyuki</au><au>Tada, Tetsuya</au><au>Utegulov, Zhandos N.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Photonic metasurface made of array of lens-like SiGe Mie resonators formed on (100) Si substrate via dewetting</atitle><jtitle>Applied physics express</jtitle><addtitle>Appl. Phys. Express</addtitle><date>2017-12-01</date><risdate>2017</risdate><volume>10</volume><issue>12</issue><spage>125501</spage><pages>125501-</pages><issn>1882-0778</issn><eissn>1882-0786</eissn><coden>APEPC4</coden><abstract>Metasurfaces consisting of arrays of high-index Mie resonators concentrating/redirecting light are important for integrated optics, photodetectors, and solar cells. Herein, we report the optical properties of low-Ge-content SiGe lens-like Mie resonator island arrays fabricated via dewetting during Ge deposition on a Si(100) surface at approximately 900 °C. We observe enhancement of the Si interaction with light owing to the efficient island-induced light concentration in the submicron-depth Si layer, which is mediated by both near-field Mie resonance leaking into the substrate and far-field light focusing. Such metasurfaces can improve the Si photodetector and solar-cell performance.</abstract><pub>The Japan Society of Applied Physics</pub><doi>10.7567/APEX.10.125501</doi><tpages>4</tpages></addata></record>
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title Photonic metasurface made of array of lens-like SiGe Mie resonators formed on (100) Si substrate via dewetting
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-15T02%3A33%3A01IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-iop_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Photonic%20metasurface%20made%20of%20array%20of%20lens-like%20SiGe%20Mie%20resonators%20formed%20on%20(100)%20Si%20substrate%20via%20dewetting&rft.jtitle=Applied%20physics%20express&rft.au=Poborchii,%20Vladimir&rft.date=2017-12-01&rft.volume=10&rft.issue=12&rft.spage=125501&rft.pages=125501-&rft.issn=1882-0778&rft.eissn=1882-0786&rft.coden=APEPC4&rft_id=info:doi/10.7567/APEX.10.125501&rft_dat=%3Ciop_cross%3EAP170743%3C/iop_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true