Silicon-based high sensitivity of room-temperature microwave and sub-terahertz detector

We demonstrated a Si-based photoelectric detector with silicon-on-insulator structure. The Si-based detector was successfully fabricated and showed broadband response from 20-40 GHz to 0.165-0.173 THz radiation at room temperature. It achieved a maximal responsivity of 49.3 kV W−1 and noise equivale...

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Veröffentlicht in:Applied physics express 2019-05, Vol.12 (5), p.52013
Hauptverfasser: Wu, Caiyang, Zhou, Wei, Yao, Niangjuan, Xu, Xinyue, Qu, Yue, Zhang, Zhibo, Wu, Jing, Jiang, Lin, Huang, Zhiming, Chu, Junhao
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container_end_page
container_issue 5
container_start_page 52013
container_title Applied physics express
container_volume 12
creator Wu, Caiyang
Zhou, Wei
Yao, Niangjuan
Xu, Xinyue
Qu, Yue
Zhang, Zhibo
Wu, Jing
Jiang, Lin
Huang, Zhiming
Chu, Junhao
description We demonstrated a Si-based photoelectric detector with silicon-on-insulator structure. The Si-based detector was successfully fabricated and showed broadband response from 20-40 GHz to 0.165-0.173 THz radiation at room temperature. It achieved a maximal responsivity of 49.3 kV W−1 and noise equivalent power (NEP) of 0.38 pW H z − 1 2 at 20-40 GHz, and achieved a responsivity of 3.3 kV W−1 and NEP of 5.7 pW H z − 1 2 at 0.165-0.173 THz; moreover, a short response time ∼810 ns was realized for the detector. The simple structure, excellent performance and easy integration of the detectors, which provides an avenue to the optoelectronic integration of sensitive room-temperature terahertz focal-plane arrays.
doi_str_mv 10.7567/1882-0786/ab14fc
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subjects Photoconductive
photoelectric detection
Si-based
SOI
sub-terahertz
title Silicon-based high sensitivity of room-temperature microwave and sub-terahertz detector
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