Atomic resolution structural analysis of magnesium segregation at a pyramidal inversion domain in a GaN epitaxial layer
Pyramidal inversion domains (PIDs) with (0001) bases several nanometers wide are commonly observed in highly Mg-doped GaN epitaxial layers. High-angle annular dark field scanning transmission electron microscopy clarified the PID boundary structure, concluding debate on previously proposed Mg segreg...
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Veröffentlicht in: | Applied physics express 2019-03, Vol.12 (3), p.31004 |
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creator | Iwata, Kenji Narita, Tetsuo Nagao, Masahiro Tomita, Kazuyoshi Kataoka, Keita Kachi, Tetsu Ikarashi, Nobuyuki |
description | Pyramidal inversion domains (PIDs) with (0001) bases several nanometers wide are commonly observed in highly Mg-doped GaN epitaxial layers. High-angle annular dark field scanning transmission electron microscopy clarified the PID boundary structure, concluding debate on previously proposed Mg segregation models: Mg atoms segregate to form a single atomic layer at the boundary and substitute 1/4 of Ga atoms in the neighboring Ga layers. We explain that the Mg segregation produces electrically inactive Mg atoms and can be a cause of the free carrier reduction in the highly Mg-doped GaN. The PID formation process during the epitaxial growth is also discussed. |
doi_str_mv | 10.7567/1882-0786/ab04f1 |
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High-angle annular dark field scanning transmission electron microscopy clarified the PID boundary structure, concluding debate on previously proposed Mg segregation models: Mg atoms segregate to form a single atomic layer at the boundary and substitute 1/4 of Ga atoms in the neighboring Ga layers. We explain that the Mg segregation produces electrically inactive Mg atoms and can be a cause of the free carrier reduction in the highly Mg-doped GaN. The PID formation process during the epitaxial growth is also discussed.</description><identifier>ISSN: 1882-0778</identifier><identifier>EISSN: 1882-0786</identifier><identifier>DOI: 10.7567/1882-0786/ab04f1</identifier><identifier>CODEN: APEPC4</identifier><language>eng</language><publisher>IOP Publishing</publisher><ispartof>Applied physics express, 2019-03, Vol.12 (3), p.31004</ispartof><rights>2019 The Japan Society of Applied Physics</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c421t-a005cef33c82f6b74f14b3a38718c4ada7cfff2912661eef484ff02f145fedce3</citedby><cites>FETCH-LOGICAL-c421t-a005cef33c82f6b74f14b3a38718c4ada7cfff2912661eef484ff02f145fedce3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.7567/1882-0786/ab04f1/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>315,781,785,27929,27930,53851,53898</link.rule.ids></links><search><creatorcontrib>Iwata, Kenji</creatorcontrib><creatorcontrib>Narita, Tetsuo</creatorcontrib><creatorcontrib>Nagao, Masahiro</creatorcontrib><creatorcontrib>Tomita, Kazuyoshi</creatorcontrib><creatorcontrib>Kataoka, Keita</creatorcontrib><creatorcontrib>Kachi, Tetsu</creatorcontrib><creatorcontrib>Ikarashi, Nobuyuki</creatorcontrib><title>Atomic resolution structural analysis of magnesium segregation at a pyramidal inversion domain in a GaN epitaxial layer</title><title>Applied physics express</title><addtitle>Appl. Phys. Express</addtitle><description>Pyramidal inversion domains (PIDs) with (0001) bases several nanometers wide are commonly observed in highly Mg-doped GaN epitaxial layers. High-angle annular dark field scanning transmission electron microscopy clarified the PID boundary structure, concluding debate on previously proposed Mg segregation models: Mg atoms segregate to form a single atomic layer at the boundary and substitute 1/4 of Ga atoms in the neighboring Ga layers. We explain that the Mg segregation produces electrically inactive Mg atoms and can be a cause of the free carrier reduction in the highly Mg-doped GaN. 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Phys. Express</addtitle><date>2019-03-01</date><risdate>2019</risdate><volume>12</volume><issue>3</issue><spage>31004</spage><pages>31004-</pages><issn>1882-0778</issn><eissn>1882-0786</eissn><coden>APEPC4</coden><abstract>Pyramidal inversion domains (PIDs) with (0001) bases several nanometers wide are commonly observed in highly Mg-doped GaN epitaxial layers. High-angle annular dark field scanning transmission electron microscopy clarified the PID boundary structure, concluding debate on previously proposed Mg segregation models: Mg atoms segregate to form a single atomic layer at the boundary and substitute 1/4 of Ga atoms in the neighboring Ga layers. We explain that the Mg segregation produces electrically inactive Mg atoms and can be a cause of the free carrier reduction in the highly Mg-doped GaN. The PID formation process during the epitaxial growth is also discussed.</abstract><pub>IOP Publishing</pub><doi>10.7567/1882-0786/ab04f1</doi><tpages>4</tpages><oa>free_for_read</oa></addata></record> |
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title | Atomic resolution structural analysis of magnesium segregation at a pyramidal inversion domain in a GaN epitaxial layer |
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