Atomic resolution structural analysis of magnesium segregation at a pyramidal inversion domain in a GaN epitaxial layer

Pyramidal inversion domains (PIDs) with (0001) bases several nanometers wide are commonly observed in highly Mg-doped GaN epitaxial layers. High-angle annular dark field scanning transmission electron microscopy clarified the PID boundary structure, concluding debate on previously proposed Mg segreg...

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Veröffentlicht in:Applied physics express 2019-03, Vol.12 (3), p.31004
Hauptverfasser: Iwata, Kenji, Narita, Tetsuo, Nagao, Masahiro, Tomita, Kazuyoshi, Kataoka, Keita, Kachi, Tetsu, Ikarashi, Nobuyuki
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container_issue 3
container_start_page 31004
container_title Applied physics express
container_volume 12
creator Iwata, Kenji
Narita, Tetsuo
Nagao, Masahiro
Tomita, Kazuyoshi
Kataoka, Keita
Kachi, Tetsu
Ikarashi, Nobuyuki
description Pyramidal inversion domains (PIDs) with (0001) bases several nanometers wide are commonly observed in highly Mg-doped GaN epitaxial layers. High-angle annular dark field scanning transmission electron microscopy clarified the PID boundary structure, concluding debate on previously proposed Mg segregation models: Mg atoms segregate to form a single atomic layer at the boundary and substitute 1/4 of Ga atoms in the neighboring Ga layers. We explain that the Mg segregation produces electrically inactive Mg atoms and can be a cause of the free carrier reduction in the highly Mg-doped GaN. The PID formation process during the epitaxial growth is also discussed.
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title Atomic resolution structural analysis of magnesium segregation at a pyramidal inversion domain in a GaN epitaxial layer
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