Electrical properties of crosslinked aliphatic polyurea thin films prepared by vapor deposition polymerization

Vapor deposition polymerization (VDP) is a method for producing high-performance polymeric thin films, such as polyimide, polyamide and polyurea, by co-evaporation of two types of bi-functional monomers on the substrate surface. Polymeric films obtained by VDP have a high dielectric constant and hig...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2020-03, Vol.59 (3), p.36502
Hauptverfasser:	Tanaka, Takaaki, Tsuji, Akira, Shimoyama, Akifumi, Hayakawa, Munetaka, Matsubara, Ryousuke, Kubono, Atsushi
Format:	Artikel
Sprache:	eng
Schlagworte:	electrical properties infrared spectra intermolecular hydrogen bond organic thin film vapor deposition polymerization
Online-Zugang:	Volltext
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