Constriction of a lattice constant in an epitaxial magnesium oxide film deposited on a silicon substrate

We demonstrated epitaxial growth of magnesium oxide (MgO) on a silicon (Si) substrate with cubic on cubic structure [MgO(001)//Si(001) and MgO(100)//Si(100)]. Epitaxial films were prepared using the pulsed laser deposition method, and with dependent on deposition conditions of oxygen partial pressur...

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Veröffentlicht in:Japanese Journal of Applied Physics 2019-02, Vol.58 (SA), p.SAAD06
Hauptverfasser: Kaneko, Satoru, Tokumasu, Takashi, Nakamaru, Yoshimi, Kokubun, Chiemi, Konda, Kayoko, Yasui, Manabu, Kurouchi, Masahito, Can, Musa, Shawuti, Shalima, Sudo, Rieko, Endo, Tamio, Yasuhara, Shigeo, Matsuda, Akifumi, Yoshimoto, Mamoru
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container_issue SA
container_start_page SAAD06
container_title Japanese Journal of Applied Physics
container_volume 58
creator Kaneko, Satoru
Tokumasu, Takashi
Nakamaru, Yoshimi
Kokubun, Chiemi
Konda, Kayoko
Yasui, Manabu
Kurouchi, Masahito
Can, Musa
Shawuti, Shalima
Sudo, Rieko
Endo, Tamio
Yasuhara, Shigeo
Matsuda, Akifumi
Yoshimoto, Mamoru
description We demonstrated epitaxial growth of magnesium oxide (MgO) on a silicon (Si) substrate with cubic on cubic structure [MgO(001)//Si(001) and MgO(100)//Si(100)]. Epitaxial films were prepared using the pulsed laser deposition method, and with dependent on deposition conditions of oxygen partial pressure and substrate temperature, the lattice constants of MgO decreased along both the surface normal and in-plane directions. To support the facts of (1) constriction of lattice constants and (2) cubic on cubic growth, we show (1) optimal lattice constants with defects in the crystal structure, (2) domain mismatch between MgO and Si instead of lattice mismatch, and (3) stability of MgO crystals on the surface of the Si substrate.
doi_str_mv 10.7567/1347-4065/aaec11
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title Constriction of a lattice constant in an epitaxial magnesium oxide film deposited on a silicon substrate
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