Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO2/LiNbO3 structure

This paper discusses the influence of displacement and patterning of phase shifters for piston mode operation of the temperature compensated surface acoustic wave (SAW) resonator on SiO2/LiNbO3 structure. As the phase shifters, Cu metals placed on the top surface of SiO2 are considered. First, the c...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2022-07, Vol.61 (SG), p.SG1005
Hauptverfasser:	Gong, Keyuan, Wu, Zhaohui, Wong, Yu-Po, Li, Yawei, Liang, Qi, Bao, Jingfu, Hashimoto, Ken-ya
Format:	Artikel
Sprache:	eng
Schlagworte:	Copper Design parameters Displacement displacement and patterning Lithium niobates Patterning Phase shifters Resonators Silicon dioxide Surface acoustic wave devices Surface acoustic waves TC-SAW transverse mode suppression
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