Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO2/LiNbO3 structure
This paper discusses the influence of displacement and patterning of phase shifters for piston mode operation of the temperature compensated surface acoustic wave (SAW) resonator on SiO2/LiNbO3 structure. As the phase shifters, Cu metals placed on the top surface of SiO2 are considered. First, the c...
Gespeichert in:
| Veröffentlicht in: | Japanese Journal of Applied Physics 2022-07, Vol.61 (SG), p.SG1005 |
|---|---|
| Hauptverfasser: | , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | SG |
| container_start_page | SG1005 |
| container_title | Japanese Journal of Applied Physics |
| container_volume | 61 |
| creator | Gong, Keyuan Wu, Zhaohui Wong, Yu-Po Li, Yawei Liang, Qi Bao, Jingfu Hashimoto, Ken-ya |
| description | This paper discusses the influence of displacement and patterning of phase shifters for piston mode operation of the temperature compensated surface acoustic wave (SAW) resonator on SiO2/LiNbO3 structure. As the phase shifters, Cu metals placed on the top surface of SiO2 are considered. First, the conventional Cu stripes are chosen, and their displacement is considered from interdigital transducer (IDT) aperture edges. It is shown that achievable transverse mode suppression is almost identical when the stripe shape is adjusted for each case. Next, Cu dots are considered as patterned phase shifters. It is shown comparable transverse mode suppression is possible also for this case. However, relatively strong SAW lateral leakage occurs when they are placed above IDT fingers. These results indicate that location and pattern can be added as design parameters for the phase shifters on SiO2. It is favorable for further enhancement of total device performances. |
| doi_str_mv | 10.35848/1347-4065/ac4358 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_iop_j</sourceid><recordid>TN_cdi_iop_journals_10_35848_1347_4065_ac4358</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2640014927</sourcerecordid><originalsourceid>FETCH-LOGICAL-i251t-881e004e3d776160fcdeb7c1fd4451fa580ae075ed422a74ce0607fdbd419e493</originalsourceid><addsrcrecordid>eNptkc1OQyEQhYnRxFp9AHckrlxcC_dyf7o0jdYmjV1U14TCYGlaQODqM_mW0tboxoQEzvDNmeQMQteU3FV1x7oRrVhbMNLUIyFZLp2gwW_pFA0IKWnBxmV5ji5i3GTZ1IwO0NfM6m0PVgJ2GisT_VZI2IFNWFiFvUgJgjX2bf_t1yICjmujczFi7QL2JiZn8c6pbOAhiGSyzGyC3UH2AbB0-W2jSKBw7IPOE7CQro_JSPwpPgAHiM6K5LJrbl-aRTmam-fVosIxhV7uXS7RmRbbCFc_9xC9Pj68TJ6K-WI6m9zPC1PWNBVdR4EQBpVq24Y2REsFq1ZSrRirqRZ1RwSQtgbFylK0TAJpSKvVSjE6Bjauhujm6OuDe-8hJr5xfbB5JC8bRgjNKbaZKo6Ucf4PoIQftsH30fN99Py4jczf_sNvNsLzhvLlNB9KSM290tU3fQiPdg</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2640014927</pqid></control><display><type>article</type><title>Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO2/LiNbO3 structure</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>Gong, Keyuan ; Wu, Zhaohui ; Wong, Yu-Po ; Li, Yawei ; Liang, Qi ; Bao, Jingfu ; Hashimoto, Ken-ya</creator><creatorcontrib>Gong, Keyuan ; Wu, Zhaohui ; Wong, Yu-Po ; Li, Yawei ; Liang, Qi ; Bao, Jingfu ; Hashimoto, Ken-ya</creatorcontrib><description>This paper discusses the influence of displacement and patterning of phase shifters for piston mode operation of the temperature compensated surface acoustic wave (SAW) resonator on SiO2/LiNbO3 structure. As the phase shifters, Cu metals placed on the top surface of SiO2 are considered. First, the conventional Cu stripes are chosen, and their displacement is considered from interdigital transducer (IDT) aperture edges. It is shown that achievable transverse mode suppression is almost identical when the stripe shape is adjusted for each case. Next, Cu dots are considered as patterned phase shifters. It is shown comparable transverse mode suppression is possible also for this case. However, relatively strong SAW lateral leakage occurs when they are placed above IDT fingers. These results indicate that location and pattern can be added as design parameters for the phase shifters on SiO2. It is favorable for further enhancement of total device performances.</description><identifier>ISSN: 0021-4922</identifier><identifier>EISSN: 1347-4065</identifier><identifier>DOI: 10.35848/1347-4065/ac4358</identifier><identifier>CODEN: JJAPB6</identifier><language>eng</language><publisher>Tokyo: IOP Publishing</publisher><subject>Copper ; Design parameters ; Displacement ; displacement and patterning ; Lithium niobates ; Patterning ; Phase shifters ; Resonators ; Silicon dioxide ; Surface acoustic wave devices ; Surface acoustic waves ; TC-SAW ; transverse mode suppression</subject><ispartof>Japanese Journal of Applied Physics, 2022-07, Vol.61 (SG), p.SG1005</ispartof><rights>2022 The Japan Society of Applied Physics</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><orcidid>0000-0001-5620-8132 ; 0000-0001-7377-6457 ; 0000-0003-4372-2786</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.35848/1347-4065/ac4358/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,777,781,27905,27906,53827,53874</link.rule.ids></links><search><creatorcontrib>Gong, Keyuan</creatorcontrib><creatorcontrib>Wu, Zhaohui</creatorcontrib><creatorcontrib>Wong, Yu-Po</creatorcontrib><creatorcontrib>Li, Yawei</creatorcontrib><creatorcontrib>Liang, Qi</creatorcontrib><creatorcontrib>Bao, Jingfu</creatorcontrib><creatorcontrib>Hashimoto, Ken-ya</creatorcontrib><title>Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO2/LiNbO3 structure</title><title>Japanese Journal of Applied Physics</title><addtitle>Jpn. J. Appl. Phys</addtitle><description>This paper discusses the influence of displacement and patterning of phase shifters for piston mode operation of the temperature compensated surface acoustic wave (SAW) resonator on SiO2/LiNbO3 structure. As the phase shifters, Cu metals placed on the top surface of SiO2 are considered. First, the conventional Cu stripes are chosen, and their displacement is considered from interdigital transducer (IDT) aperture edges. It is shown that achievable transverse mode suppression is almost identical when the stripe shape is adjusted for each case. Next, Cu dots are considered as patterned phase shifters. It is shown comparable transverse mode suppression is possible also for this case. However, relatively strong SAW lateral leakage occurs when they are placed above IDT fingers. These results indicate that location and pattern can be added as design parameters for the phase shifters on SiO2. It is favorable for further enhancement of total device performances.</description><subject>Copper</subject><subject>Design parameters</subject><subject>Displacement</subject><subject>displacement and patterning</subject><subject>Lithium niobates</subject><subject>Patterning</subject><subject>Phase shifters</subject><subject>Resonators</subject><subject>Silicon dioxide</subject><subject>Surface acoustic wave devices</subject><subject>Surface acoustic waves</subject><subject>TC-SAW</subject><subject>transverse mode suppression</subject><issn>0021-4922</issn><issn>1347-4065</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><recordid>eNptkc1OQyEQhYnRxFp9AHckrlxcC_dyf7o0jdYmjV1U14TCYGlaQODqM_mW0tboxoQEzvDNmeQMQteU3FV1x7oRrVhbMNLUIyFZLp2gwW_pFA0IKWnBxmV5ji5i3GTZ1IwO0NfM6m0PVgJ2GisT_VZI2IFNWFiFvUgJgjX2bf_t1yICjmujczFi7QL2JiZn8c6pbOAhiGSyzGyC3UH2AbB0-W2jSKBw7IPOE7CQro_JSPwpPgAHiM6K5LJrbl-aRTmam-fVosIxhV7uXS7RmRbbCFc_9xC9Pj68TJ6K-WI6m9zPC1PWNBVdR4EQBpVq24Y2REsFq1ZSrRirqRZ1RwSQtgbFylK0TAJpSKvVSjE6Bjauhujm6OuDe-8hJr5xfbB5JC8bRgjNKbaZKo6Ucf4PoIQftsH30fN99Py4jczf_sNvNsLzhvLlNB9KSM290tU3fQiPdg</recordid><startdate>20220701</startdate><enddate>20220701</enddate><creator>Gong, Keyuan</creator><creator>Wu, Zhaohui</creator><creator>Wong, Yu-Po</creator><creator>Li, Yawei</creator><creator>Liang, Qi</creator><creator>Bao, Jingfu</creator><creator>Hashimoto, Ken-ya</creator><general>IOP Publishing</general><general>Japanese Journal of Applied Physics</general><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0001-5620-8132</orcidid><orcidid>https://orcid.org/0000-0001-7377-6457</orcidid><orcidid>https://orcid.org/0000-0003-4372-2786</orcidid></search><sort><creationdate>20220701</creationdate><title>Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO2/LiNbO3 structure</title><author>Gong, Keyuan ; Wu, Zhaohui ; Wong, Yu-Po ; Li, Yawei ; Liang, Qi ; Bao, Jingfu ; Hashimoto, Ken-ya</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i251t-881e004e3d776160fcdeb7c1fd4451fa580ae075ed422a74ce0607fdbd419e493</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><topic>Copper</topic><topic>Design parameters</topic><topic>Displacement</topic><topic>displacement and patterning</topic><topic>Lithium niobates</topic><topic>Patterning</topic><topic>Phase shifters</topic><topic>Resonators</topic><topic>Silicon dioxide</topic><topic>Surface acoustic wave devices</topic><topic>Surface acoustic waves</topic><topic>TC-SAW</topic><topic>transverse mode suppression</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Gong, Keyuan</creatorcontrib><creatorcontrib>Wu, Zhaohui</creatorcontrib><creatorcontrib>Wong, Yu-Po</creatorcontrib><creatorcontrib>Li, Yawei</creatorcontrib><creatorcontrib>Liang, Qi</creatorcontrib><creatorcontrib>Bao, Jingfu</creatorcontrib><creatorcontrib>Hashimoto, Ken-ya</creatorcontrib><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Japanese Journal of Applied Physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Gong, Keyuan</au><au>Wu, Zhaohui</au><au>Wong, Yu-Po</au><au>Li, Yawei</au><au>Liang, Qi</au><au>Bao, Jingfu</au><au>Hashimoto, Ken-ya</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO2/LiNbO3 structure</atitle><jtitle>Japanese Journal of Applied Physics</jtitle><addtitle>Jpn. J. Appl. Phys</addtitle><date>2022-07-01</date><risdate>2022</risdate><volume>61</volume><issue>SG</issue><spage>SG1005</spage><pages>SG1005-</pages><issn>0021-4922</issn><eissn>1347-4065</eissn><coden>JJAPB6</coden><abstract>This paper discusses the influence of displacement and patterning of phase shifters for piston mode operation of the temperature compensated surface acoustic wave (SAW) resonator on SiO2/LiNbO3 structure. As the phase shifters, Cu metals placed on the top surface of SiO2 are considered. First, the conventional Cu stripes are chosen, and their displacement is considered from interdigital transducer (IDT) aperture edges. It is shown that achievable transverse mode suppression is almost identical when the stripe shape is adjusted for each case. Next, Cu dots are considered as patterned phase shifters. It is shown comparable transverse mode suppression is possible also for this case. However, relatively strong SAW lateral leakage occurs when they are placed above IDT fingers. These results indicate that location and pattern can be added as design parameters for the phase shifters on SiO2. It is favorable for further enhancement of total device performances.</abstract><cop>Tokyo</cop><pub>IOP Publishing</pub><doi>10.35848/1347-4065/ac4358</doi><tpages>4</tpages><orcidid>https://orcid.org/0000-0001-5620-8132</orcidid><orcidid>https://orcid.org/0000-0001-7377-6457</orcidid><orcidid>https://orcid.org/0000-0003-4372-2786</orcidid></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0021-4922 |
| ispartof | Japanese Journal of Applied Physics, 2022-07, Vol.61 (SG), p.SG1005 |
| issn | 0021-4922 1347-4065 |
| language | eng |
| recordid | cdi_iop_journals_10_35848_1347_4065_ac4358 |
| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | Copper Design parameters Displacement displacement and patterning Lithium niobates Patterning Phase shifters Resonators Silicon dioxide Surface acoustic wave devices Surface acoustic waves TC-SAW transverse mode suppression |
| title | Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO2/LiNbO3 structure |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-21T05%3A13%3A33IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_iop_j&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Influence%20of%20displacement%20and%20patterning%20of%20phase%20shifters%20for%20piston%20mode%20operation%20of%20temperature%20compensated%20surface%20acoustic%20wave%20resonators%20on%20SiO2/LiNbO3%20structure&rft.jtitle=Japanese%20Journal%20of%20Applied%20Physics&rft.au=Gong,%20Keyuan&rft.date=2022-07-01&rft.volume=61&rft.issue=SG&rft.spage=SG1005&rft.pages=SG1005-&rft.issn=0021-4922&rft.eissn=1347-4065&rft.coden=JJAPB6&rft_id=info:doi/10.35848/1347-4065/ac4358&rft_dat=%3Cproquest_iop_j%3E2640014927%3C/proquest_iop_j%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2640014927&rft_id=info:pmid/&rfr_iscdi=true |