Design and characterization of a low-optical-loss UV-C laser diode

We present an optical modeling and characterization study of prototype ultraviolet laser diode (LD) structures grown on single-crystal AlN substrates, with focus on the reduction of modal loss caused by optical mode coupling to the absorptive layers on the p-side (i.e. p-contact and p-metal layers)....

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Veröffentlicht in:Japanese Journal of Applied Physics 2020-09, Vol.59 (9), p.94001
Hauptverfasser: Zhang, Ziyi, Kushimoto, Maki, Sakai, Tadayoshi, Sugiyama, Naoharu, Schowalter, Leo J., Sasaoka, Chiaki, Amano, Hiroshi
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container_end_page
container_issue 9
container_start_page 94001
container_title Japanese Journal of Applied Physics
container_volume 59
creator Zhang, Ziyi
Kushimoto, Maki
Sakai, Tadayoshi
Sugiyama, Naoharu
Schowalter, Leo J.
Sasaoka, Chiaki
Amano, Hiroshi
description We present an optical modeling and characterization study of prototype ultraviolet laser diode (LD) structures grown on single-crystal AlN substrates, with focus on the reduction of modal loss caused by optical mode coupling to the absorptive layers on the p-side (i.e. p-contact and p-metal layers). The transparent AlN substrates enabled optical pumping for measuring modal loss without requiring functioning LDs. The modal loss measured in this way was in good agreement with electrically evaluated results of processed LDs, and both results were consistent with optical modeling predictions. By using 0.32 m thick p-side cladding, we were able to suppress the modal loss of the designed LD structure to 8.4 cm−1, where the contribution from the absorptive p-contact layers was less than 3 cm−1.
doi_str_mv 10.35848/1347-4065/abaac6
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subjects Absorptivity
AlGaN
Coupled modes
Crystal growth
Crystal structure
Electric contacts
Laser Diodes
Modelling
Optical pumping
Semiconductor lasers
Single crystals
Substrates
Ultraviolet
Ultraviolet lasers
title Design and characterization of a low-optical-loss UV-C laser diode
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