Electrolyte-Insulator-Semiconductor pH Sensors with Arrayed Patterns Manufactured by Nano Imprint Technology

This work focuses on the sensing properties of electrolyte-insulator-semiconductor (EIS) pH sensors with arrayed patterns manufactured by integrating nano imprint technology (NIL) and CMOS process. The arrayed patterns, made of line and square at about ∼200-400nm with a width/space ratio of about ∼1...

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Veröffentlicht in:	Journal of the Electrochemical Society 2018, Vol.165 (14), p.B767-B772
Hauptverfasser:	Lee, Tzu Nien, Chen, Henry J. H., Huang, Yo-Chen, Hsieh, Kuang-Chien
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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