Effect of Bridging and Terminal Alkyl Groups on Structural and Mechanical Properties of Porous Organosilicate Films

Chemical composition, pore structure and mechanical properties of porous organosilicate low-k films with terminal and bridging organic groups are studied. It is shown that BTMSE based low-k films with alkyl bridge between the Si atoms have non-uniform pore structure with internal voids (ink-bottle l...

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Veröffentlicht in:	ECS journal of solid state science and technology 2017-01, Vol.6 (10), p.N182-N188
Hauptverfasser:	Nenashev, R., Wang, Yingjie, Liu, Chunhui, Kotova, N., Vorotilov, K., Zhang, Jing, Wei, Shuhua, Seregin, D., Vishnevskiy, A., Leu, Jihperng (Jim), Baklanov, M. R.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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