Nitrogen-Incorporated Hydrogenated Amorphous Carbon Film Electrodes on Ti Substrates by Hybrid Deposition Technique and Annealing

A new method was adopted to fabricate the nitrogen-incorporated hydrogenated diamond-like carbon (DLC) film electrodes with TiN/TiCN/DLC multilayers on Ti substrates by a hybrid deposition technique and post annealing. The TiN and TiCN sublayers acted as adhesive layers and a nitrogen donor source f...

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Veröffentlicht in:	Journal of the Electrochemical Society 2016-01, Vol.163 (3), p.E54-E61
Hauptverfasser:	Zhang, Teng Fei, Kim, Kwang-Wook, Kim, Kwang Ho
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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