Water Stress Corrosion in Bonded Structures

Direct bonding is now a well-known technique to join two flat surfaces without any additional material. This technique is used in many applications and especially in SOI (Silicon-On-Insulator) elaboration or in some backside imager manufacturing processes which are now almost in mass production. Dir...

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Veröffentlicht in:	ECS journal of solid state science and technology 2015-01, Vol.4 (5), p.P124-P130
Hauptverfasser:	Fournel, F., Martin-Cocher, C., Radisson, D., Larrey, V., Beche, E., Morales, C., Delean, P. A., Rieutord, F., Moriceau, H.
Format:	Artikel
Sprache:	eng
Schlagworte:	General Physics Mechanics Mechanics of materials Physics
Online-Zugang:	Volltext
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