Electrostatically Doped Planar Field-Effect Transistor for High Temperature Applications

In this paper, we present experimental results and simulation data of an electrostatically doped and therefore voltage-programmable, planar, CMOS-compatible field-effect transistor (FET) structure. This planar device is based on our previously published Si-nanowire (SiNW) technology. Schottky barrie...

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Veröffentlicht in:ECS journal of solid state science and technology 2015-01, Vol.4 (5), p.Q46-Q50
Hauptverfasser: Krauss, Tillmann, Wessely, Frank, Schwalke, Udo
Format: Artikel
Sprache:eng
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Zusammenfassung:In this paper, we present experimental results and simulation data of an electrostatically doped and therefore voltage-programmable, planar, CMOS-compatible field-effect transistor (FET) structure. This planar device is based on our previously published Si-nanowire (SiNW) technology. Schottky barrier source/drain (S/D) contacts and a silicon-on-insulator (SOI) technology platform are the key features of this dual-gated but single channel universal FET. The combination of two electrically independent gates, one back-gate for S/D Schottky barrier modulation as well as channel formation to establish Schottky barrier FET (SBFET) operation and one front-gate forming a junctionless FET (JLFET) for actual current control, significantly increases the temperature robustness of the device.
ISSN:2162-8769
2162-8777
DOI:10.1149/2.0021507jss