Pattern Dependency of Pure-Boron-Layer Chemical-Vapor Depositions

The pattern dependency of pure-boron (PureB) layer chemical-vapor depositions (CVD) is studied with respect to the correlation between the deposition rate and features like loading effects, deposition parameters and deposition window sizes. It is shown experimentally that the oxide coverage ratio an...

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Veröffentlicht in:	ECS transactions 2012-04, Vol.45 (6), p.39-48
Hauptverfasser:	Mohammadi, Vahid, De Boer, Wiebe, Scholtes, Tom L., Nanver, Lis K.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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