(Invited) Printed Poly-Si TFTs on Paper for Beyond Plastic Electronics

(Invited) Printed Poly-Si TFTs on Paper for Beyond Plastic Electronics

Silicon can be printed using liquid silicon ink, which is a mixture of polymerized cyclopentasilane (CPS) and a solvent. Thermal annealing higher than 350°C of this material, however, was necessary, to convert it to solid silicon, which prevented its usage on inexpensive substrates with a limited th...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Ishihara, Ryoichi, Trifunovic, Miki, Sberna, Paolo, Shimoda, Tatsuya
Format: Tagungsbericht
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 55
container_issue 11
container_start_page 47
container_title
container_volume 86
creator Ishihara, Ryoichi
Trifunovic, Miki
Sberna, Paolo
Shimoda, Tatsuya
description Silicon can be printed using liquid silicon ink, which is a mixture of polymerized cyclopentasilane (CPS) and a solvent. Thermal annealing higher than 350°C of this material, however, was necessary, to convert it to solid silicon, which prevented its usage on inexpensive substrates with a limited thermal budget. We review a novel method that forms polycrystalline silicon (poly-Si) patterns directly on paper using the same liquid silicon with doctor-blade coating and local irradiation of excimer-laser with room temperature process. We review also the process and electrical properties of poly-Si TFTs fabricated on the paper. This technique will breakthrough the printed electronics by enabling applications such as fast printed electronics that are inexpensive, fully-recyclable, biodegradable and even edible.
doi_str_mv 10.1149/08611.0047ecst
format Conference Proceeding
fullrecord <record><control><sourceid>iop_cross</sourceid><recordid>TN_cdi_iop_journals_10_1149_08611_0047ecst</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10.1149/08611.0047ecst</sourcerecordid><originalsourceid>FETCH-LOGICAL-c274t-3054ac877cdacacd1a4aa3d5e7979b387ba4cefcdd0eefc59a084de84808e8cb3</originalsourceid><addsrcrecordid>eNp1kEFLwzAYhoMoOKdXzzmq0JqsaZMedaw6GFiwnkP6JYWM2pSkCv33Zm4ePb3v4Xk_Ph6EbilJKWXlIxEFpSkhjBsI0xla0DITScEzfn7quShWl-gqhD0hkWV8gaq77fBtJ6Pvce3tEAuuXT8n7xY3VROwG3CtRuNx5zx-NrMbItCrMFnAm97A5N1gIVyji071wdyccok-qk2zfk12by_b9dMugRVnU5KRnCkQnINWoEBTxZTKdG54ycs2E7xVDEwHWhMTIy8VEUwbwQQRRkCbLVF6vAveheBNJ0dvP5WfJSXyYEH-WpB_FuLg4TiwbpR79-WH-N5_8A-scF6M</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>(Invited) Printed Poly-Si TFTs on Paper for Beyond Plastic Electronics</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>Ishihara, Ryoichi ; Trifunovic, Miki ; Sberna, Paolo ; Shimoda, Tatsuya</creator><creatorcontrib>Ishihara, Ryoichi ; Trifunovic, Miki ; Sberna, Paolo ; Shimoda, Tatsuya</creatorcontrib><description>Silicon can be printed using liquid silicon ink, which is a mixture of polymerized cyclopentasilane (CPS) and a solvent. Thermal annealing higher than 350°C of this material, however, was necessary, to convert it to solid silicon, which prevented its usage on inexpensive substrates with a limited thermal budget. We review a novel method that forms polycrystalline silicon (poly-Si) patterns directly on paper using the same liquid silicon with doctor-blade coating and local irradiation of excimer-laser with room temperature process. We review also the process and electrical properties of poly-Si TFTs fabricated on the paper. This technique will breakthrough the printed electronics by enabling applications such as fast printed electronics that are inexpensive, fully-recyclable, biodegradable and even edible.</description><identifier>ISSN: 1938-5862</identifier><identifier>ISSN: 1938-6737</identifier><identifier>EISSN: 1938-6737</identifier><identifier>EISSN: 1938-5862</identifier><identifier>DOI: 10.1149/08611.0047ecst</identifier><language>eng</language><publisher>The Electrochemical Society, Inc</publisher><ispartof>ECS transactions, 2018, Vol.86 (11), p.47-55</ispartof><rights>2018 ECS - The Electrochemical Society</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c274t-3054ac877cdacacd1a4aa3d5e7979b387ba4cefcdd0eefc59a084de84808e8cb3</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1149/08611.0047ecst/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,780,784,27924,27925,53846,53893</link.rule.ids></links><search><creatorcontrib>Ishihara, Ryoichi</creatorcontrib><creatorcontrib>Trifunovic, Miki</creatorcontrib><creatorcontrib>Sberna, Paolo</creatorcontrib><creatorcontrib>Shimoda, Tatsuya</creatorcontrib><title>(Invited) Printed Poly-Si TFTs on Paper for Beyond Plastic Electronics</title><title>ECS transactions</title><addtitle>ECS Trans</addtitle><description>Silicon can be printed using liquid silicon ink, which is a mixture of polymerized cyclopentasilane (CPS) and a solvent. Thermal annealing higher than 350°C of this material, however, was necessary, to convert it to solid silicon, which prevented its usage on inexpensive substrates with a limited thermal budget. We review a novel method that forms polycrystalline silicon (poly-Si) patterns directly on paper using the same liquid silicon with doctor-blade coating and local irradiation of excimer-laser with room temperature process. We review also the process and electrical properties of poly-Si TFTs fabricated on the paper. This technique will breakthrough the printed electronics by enabling applications such as fast printed electronics that are inexpensive, fully-recyclable, biodegradable and even edible.</description><issn>1938-5862</issn><issn>1938-6737</issn><issn>1938-6737</issn><issn>1938-5862</issn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2018</creationdate><recordtype>conference_proceeding</recordtype><recordid>eNp1kEFLwzAYhoMoOKdXzzmq0JqsaZMedaw6GFiwnkP6JYWM2pSkCv33Zm4ePb3v4Xk_Ph6EbilJKWXlIxEFpSkhjBsI0xla0DITScEzfn7quShWl-gqhD0hkWV8gaq77fBtJ6Pvce3tEAuuXT8n7xY3VROwG3CtRuNx5zx-NrMbItCrMFnAm97A5N1gIVyji071wdyccok-qk2zfk12by_b9dMugRVnU5KRnCkQnINWoEBTxZTKdG54ycs2E7xVDEwHWhMTIy8VEUwbwQQRRkCbLVF6vAveheBNJ0dvP5WfJSXyYEH-WpB_FuLg4TiwbpR79-WH-N5_8A-scF6M</recordid><startdate>20180723</startdate><enddate>20180723</enddate><creator>Ishihara, Ryoichi</creator><creator>Trifunovic, Miki</creator><creator>Sberna, Paolo</creator><creator>Shimoda, Tatsuya</creator><general>The Electrochemical Society, Inc</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20180723</creationdate><title>(Invited) Printed Poly-Si TFTs on Paper for Beyond Plastic Electronics</title><author>Ishihara, Ryoichi ; Trifunovic, Miki ; Sberna, Paolo ; Shimoda, Tatsuya</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c274t-3054ac877cdacacd1a4aa3d5e7979b387ba4cefcdd0eefc59a084de84808e8cb3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2018</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Ishihara, Ryoichi</creatorcontrib><creatorcontrib>Trifunovic, Miki</creatorcontrib><creatorcontrib>Sberna, Paolo</creatorcontrib><creatorcontrib>Shimoda, Tatsuya</creatorcontrib><collection>CrossRef</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ishihara, Ryoichi</au><au>Trifunovic, Miki</au><au>Sberna, Paolo</au><au>Shimoda, Tatsuya</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>(Invited) Printed Poly-Si TFTs on Paper for Beyond Plastic Electronics</atitle><btitle>ECS transactions</btitle><addtitle>ECS Trans</addtitle><date>2018-07-23</date><risdate>2018</risdate><volume>86</volume><issue>11</issue><spage>47</spage><epage>55</epage><pages>47-55</pages><issn>1938-5862</issn><issn>1938-6737</issn><eissn>1938-6737</eissn><eissn>1938-5862</eissn><abstract>Silicon can be printed using liquid silicon ink, which is a mixture of polymerized cyclopentasilane (CPS) and a solvent. Thermal annealing higher than 350°C of this material, however, was necessary, to convert it to solid silicon, which prevented its usage on inexpensive substrates with a limited thermal budget. We review a novel method that forms polycrystalline silicon (poly-Si) patterns directly on paper using the same liquid silicon with doctor-blade coating and local irradiation of excimer-laser with room temperature process. We review also the process and electrical properties of poly-Si TFTs fabricated on the paper. This technique will breakthrough the printed electronics by enabling applications such as fast printed electronics that are inexpensive, fully-recyclable, biodegradable and even edible.</abstract><pub>The Electrochemical Society, Inc</pub><doi>10.1149/08611.0047ecst</doi><tpages>9</tpages></addata></record>
fulltext fulltext
identifier ISSN: 1938-5862
ispartof ECS transactions, 2018, Vol.86 (11), p.47-55
issn 1938-5862
1938-6737
1938-6737
1938-5862
language eng
recordid cdi_iop_journals_10_1149_08611_0047ecst
source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
title (Invited) Printed Poly-Si TFTs on Paper for Beyond Plastic Electronics
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-26T10%3A36%3A15IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-iop_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=(Invited)%20Printed%20Poly-Si%20TFTs%20on%20Paper%20for%20Beyond%20Plastic%20Electronics&rft.btitle=ECS%20transactions&rft.au=Ishihara,%20Ryoichi&rft.date=2018-07-23&rft.volume=86&rft.issue=11&rft.spage=47&rft.epage=55&rft.pages=47-55&rft.issn=1938-5862&rft.eissn=1938-6737&rft_id=info:doi/10.1149/08611.0047ecst&rft_dat=%3Ciop_cross%3E10.1149/08611.0047ecst%3C/iop_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true