Evaluation of Anisotropic Three-Dimensional Strain Relaxation in Stripe-Shaped Ge1-xSnx Mesa Structure

We evaluated the anisotropic three-dimensional strain relaxation in the patterned Ge1-xSnx mesa structure by Raman spectroscopy and X-ray diffraction(XRD). The strain states in the channel region change complicatedly depending on the channel shape. Therefore, accurate strain evaluation technique is...

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Veröffentlicht in:	ECS transactions 2018-07, Vol.86 (7), p.329-336
Hauptverfasser:	Takahashi, Yuki, Yokogawa, Ryo, Murakami, Tatsumi, Hirosawa, Ichiro, Suda, Kohei, Ogura, Atsushi
Format:	Artikel
Sprache:	eng ; jpn
Online-Zugang:	Volltext
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