Characterization of Ge1-x-ySixSny Ternary Alloys - Comparison of UHV-CVD and Gas Source MBE Growth

Electrical, structural, and materials characteristics are reported for Ge1-x-ySixSny ternary alloys grown by UHV-CVD and gas source MBE. Composition and local bonding configuration are determined by XPS. Crystalline structural characteristics and relaxation of film strain were measured with X-ray di...

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Hauptverfasser:	Claflin, Bruce, Kiefer, Arnold, Beeler, Richard, Fang, Z.-Q., Grzybowski, Gordon
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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