Structural Features of Nano-Scale Damascene Copper Lines after Annealing in Wide Temperature Range

Grain structure and texture evolved in damascene nano-scale copper lines after annealing in a wide temperature interval of 200oC-500oC were analyzed. Electron backscatter diffraction (EBSD) technique was used for rigorous investigation of the overburden layer, upper and bottom parts of the lines. In...

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Veröffentlicht in:	ECS transactions 2014-02, Vol.58 (17), p.29-36
Hauptverfasser:	Konkova, Tatyana N., Mironov, Sergey Yu, Ke, Yiqing, Onuki, Jin
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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