Highly Reliable Encapsulation Films for OLEDs Composed of SiNx and SiOxCy Prepared Using SWP-CVD

We previously succeeded in developing a highly transparent, water impermeable SiNx film for organic light-emitting displays using a surface-wave-plasma enhanced chemical vapor deposition system (SWP-CVD). In this report, we examine multilayer structures consisting of SiNx layers and newly developed...

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Bibliographische Detailangaben

Hauptverfasser:	Ueno, Satoko, Yomogida, Mamoru, Suzuki, Masayasu, Konishi, Yoshiyuki, Azuma, Kazufumi
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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