Modeling a Novel MEMS Gyroscope

Modeling a Novel MEMS Gyroscope

Different designs of Thermal MEMS gyroscope are presented and compared through the use of the Comsol Multiphysics software package. Previously designed Thermal MEMS gyroscopes show some limitations such as being vulnerable to gravity force. Finding a technique to increase the range of thermal MEMS g...

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Veröffentlicht in:ECS transactions 2013-02, Vol.45 (14), p.25-36
Hauptverfasser: Zarei, Nilgoon, Leung, Albert, Jones, John Dewey
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Leung, Albert
Jones, John Dewey
description Different designs of Thermal MEMS gyroscope are presented and compared through the use of the Comsol Multiphysics software package. Previously designed Thermal MEMS gyroscopes show some limitations such as being vulnerable to gravity force. Finding a technique to increase the range of thermal MEMS gyroscope reliability motivated us to come up with a new design that we refer to as the `Forced Convection MEMS gyroscope'. An external force has been introduced to the system to create a higher-velocity hot gas stream that will be deviated more in response to rotation. The external force should be great enough that convection currents resulting from gravity or acceleration will have minimal impact on the gyroscope sensitivity. A heating element can still be used, but its primary purpose is now to warm the flowing gas so that it can be detected by the sensors.
doi_str_mv 10.1149/04514.0025ecst
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fullrecord <record><control><sourceid>iop_cross</sourceid><recordid>TN_cdi_iop_journals_10_1149_04514_0025ecst</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10.1149/04514.0025ecst</sourcerecordid><originalsourceid>FETCH-LOGICAL-c311t-fec9c44a70cc43abd72189d12a0dbf468c1a2c1f5b453659a94aaf69bf328d173</originalsourceid><addsrcrecordid>eNp1jz1PwzAQhi0EEqWwspIZKanPn_GIqlKQmjIAs-X4A6UKdWQXpP57UlpGprvhnnvfB6FbwBUAUzPMOLAKY8K9zbszNAFF61JIKs9PO68FuURXOW8wFiMjJ-iuic733fajMMU6fvu-aBbNa7Hcp5htHPw1ugimz_7mNKfo_XHxNn8qVy_L5_nDqrQUYFcGb5VlzEhsLaOmdZJArRwQg10bmKgtGGIh8JZxKrgyihkThGoDJbUDSaeoOv61Y3BOPughdZ8m7TVgfdDTv3r6T28E7o9AFwe9iV9pO9b77_gHwd1PTg</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Modeling a Novel MEMS Gyroscope</title><source>Institute of Physics Journals</source><creator>Zarei, Nilgoon ; Leung, Albert ; Jones, John Dewey</creator><creatorcontrib>Zarei, Nilgoon ; Leung, Albert ; Jones, John Dewey</creatorcontrib><description>Different designs of Thermal MEMS gyroscope are presented and compared through the use of the Comsol Multiphysics software package. Previously designed Thermal MEMS gyroscopes show some limitations such as being vulnerable to gravity force. Finding a technique to increase the range of thermal MEMS gyroscope reliability motivated us to come up with a new design that we refer to as the `Forced Convection MEMS gyroscope'. An external force has been introduced to the system to create a higher-velocity hot gas stream that will be deviated more in response to rotation. The external force should be great enough that convection currents resulting from gravity or acceleration will have minimal impact on the gyroscope sensitivity. A heating element can still be used, but its primary purpose is now to warm the flowing gas so that it can be detected by the sensors.</description><identifier>ISSN: 1938-5862</identifier><identifier>EISSN: 1938-6737</identifier><identifier>DOI: 10.1149/04514.0025ecst</identifier><language>eng</language><publisher>The Electrochemical Society, Inc</publisher><ispartof>ECS transactions, 2013-02, Vol.45 (14), p.25-36</ispartof><rights>2013 ECS - The Electrochemical Society</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c311t-fec9c44a70cc43abd72189d12a0dbf468c1a2c1f5b453659a94aaf69bf328d173</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1149/04514.0025ecst/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,780,784,27924,27925,53846,53893</link.rule.ids></links><search><creatorcontrib>Zarei, Nilgoon</creatorcontrib><creatorcontrib>Leung, Albert</creatorcontrib><creatorcontrib>Jones, John Dewey</creatorcontrib><title>Modeling a Novel MEMS Gyroscope</title><title>ECS transactions</title><addtitle>ECS Trans</addtitle><description>Different designs of Thermal MEMS gyroscope are presented and compared through the use of the Comsol Multiphysics software package. Previously designed Thermal MEMS gyroscopes show some limitations such as being vulnerable to gravity force. Finding a technique to increase the range of thermal MEMS gyroscope reliability motivated us to come up with a new design that we refer to as the `Forced Convection MEMS gyroscope'. An external force has been introduced to the system to create a higher-velocity hot gas stream that will be deviated more in response to rotation. The external force should be great enough that convection currents resulting from gravity or acceleration will have minimal impact on the gyroscope sensitivity. A heating element can still be used, but its primary purpose is now to warm the flowing gas so that it can be detected by the sensors.</description><issn>1938-5862</issn><issn>1938-6737</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><recordid>eNp1jz1PwzAQhi0EEqWwspIZKanPn_GIqlKQmjIAs-X4A6UKdWQXpP57UlpGprvhnnvfB6FbwBUAUzPMOLAKY8K9zbszNAFF61JIKs9PO68FuURXOW8wFiMjJ-iuic733fajMMU6fvu-aBbNa7Hcp5htHPw1ugimz_7mNKfo_XHxNn8qVy_L5_nDqrQUYFcGb5VlzEhsLaOmdZJArRwQg10bmKgtGGIh8JZxKrgyihkThGoDJbUDSaeoOv61Y3BOPughdZ8m7TVgfdDTv3r6T28E7o9AFwe9iV9pO9b77_gHwd1PTg</recordid><startdate>20130222</startdate><enddate>20130222</enddate><creator>Zarei, Nilgoon</creator><creator>Leung, Albert</creator><creator>Jones, John Dewey</creator><general>The Electrochemical Society, Inc</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20130222</creationdate><title>Modeling a Novel MEMS Gyroscope</title><author>Zarei, Nilgoon ; Leung, Albert ; Jones, John Dewey</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c311t-fec9c44a70cc43abd72189d12a0dbf468c1a2c1f5b453659a94aaf69bf328d173</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Zarei, Nilgoon</creatorcontrib><creatorcontrib>Leung, Albert</creatorcontrib><creatorcontrib>Jones, John Dewey</creatorcontrib><collection>CrossRef</collection><jtitle>ECS transactions</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Zarei, Nilgoon</au><au>Leung, Albert</au><au>Jones, John Dewey</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Modeling a Novel MEMS Gyroscope</atitle><jtitle>ECS transactions</jtitle><addtitle>ECS Trans</addtitle><date>2013-02-22</date><risdate>2013</risdate><volume>45</volume><issue>14</issue><spage>25</spage><epage>36</epage><pages>25-36</pages><issn>1938-5862</issn><eissn>1938-6737</eissn><abstract>Different designs of Thermal MEMS gyroscope are presented and compared through the use of the Comsol Multiphysics software package. Previously designed Thermal MEMS gyroscopes show some limitations such as being vulnerable to gravity force. Finding a technique to increase the range of thermal MEMS gyroscope reliability motivated us to come up with a new design that we refer to as the `Forced Convection MEMS gyroscope'. An external force has been introduced to the system to create a higher-velocity hot gas stream that will be deviated more in response to rotation. The external force should be great enough that convection currents resulting from gravity or acceleration will have minimal impact on the gyroscope sensitivity. A heating element can still be used, but its primary purpose is now to warm the flowing gas so that it can be detected by the sensors.</abstract><pub>The Electrochemical Society, Inc</pub><doi>10.1149/04514.0025ecst</doi><tpages>12</tpages></addata></record>
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title Modeling a Novel MEMS Gyroscope
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-28T17%3A37%3A57IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-iop_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Modeling%20a%20Novel%20MEMS%20Gyroscope&rft.jtitle=ECS%20transactions&rft.au=Zarei,%20Nilgoon&rft.date=2013-02-22&rft.volume=45&rft.issue=14&rft.spage=25&rft.epage=36&rft.pages=25-36&rft.issn=1938-5862&rft.eissn=1938-6737&rft_id=info:doi/10.1149/04514.0025ecst&rft_dat=%3Ciop_cross%3E10.1149/04514.0025ecst%3C/iop_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true