Effect of external electric potential on the mechanical resonance of MEMS cantilever resonator

This work presents an analytical model to predict the natural frequency of electrostatically actuated micromachined cantilever beam under the application of DC voltage. The analytical modelling uses an energy based method with a sinusoidal vibration assumption. The electric field between the cantile...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Engineering Research Express 2022-09, Vol.4 (3), p.35020
Hauptverfasser:	Deshmukh, Ayush, K P Rao, Venkatesh
Format:	Artikel
Sprache:	eng
Schlagworte:	DC bias electrostatic spring softening MEMS cantilever natural frequency pull-in
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!