Investigation of a facile plasma-driven method for in situ cleaning of metal-based contamination

Self-cleaning of tin contaminants was realized utilizing a self-driven hydrogen plasma. Cleaning rates of 0.7–6 nm min −1 were achieved for removal of discontinuous tin particles at different powers. The analysis of topography and cross-sectional morphology revealed that the removal of tin particles...

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Veröffentlicht in:	Plasma science & technology 2023-01, Vol.25 (1), p.15501
Hauptverfasser:	WANG, Sishu, YANG, Li, PU, Guo, LIU, Jianxing, JING, Wenna, GOU, Fujun, CHEN, Shuwei, CHEN, Bo, CHEN, Jianjun, YE, Zongbiao, WEI, Jianjun
Format:	Artikel
Sprache:	eng
Schlagworte:	cleaning material plasma
Online-Zugang:	Volltext
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