FEM modeling and simulation of SMFBAR sensor with PIB as sensing layer for tetrachloroethane (PCE) gas detection

FEM modeling and simulation of SMFBAR sensor with PIB as sensing layer for tetrachloroethane (PCE) gas detection

This paper represents the design and FEM modeling of solidly mounted film bulk acoustic resonator (SMFBAR) gas sensor, based on ZnO, for Tetrachloroethane (PCE) gas detection. The effect of sensitive polyisobutylene(PIB) layer coating on mass sensitivity has been analyzed along with optimization of...

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Veröffentlicht in:Materials research express 2019-01, Vol.6 (1), p.15033
Hauptverfasser: Johar, Arun K, Patel, Raju, Periasamy, C, Agarwal, Ajay, Boolchandani, D
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finite element method (FEM)
gas sensor
piezoelectric
solidly mounted film bulk acoustic wave resonators (SMFBAR)
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Patel, Raju
Periasamy, C
Agarwal, Ajay
Boolchandani, D
description This paper represents the design and FEM modeling of solidly mounted film bulk acoustic resonator (SMFBAR) gas sensor, based on ZnO, for Tetrachloroethane (PCE) gas detection. The effect of sensitive polyisobutylene(PIB) layer coating on mass sensitivity has been analyzed along with optimization of the layer thickness. The proposed structure shows good quality factor of 758, at resonance condition, and a coupling coefficient of 7.36% for the piezoelectric layer with 2 m thickness. SMFBAR sensor was tested for detection of various gases such as, Tetrachloroethane (PCE), Trichloroethylene (TCE), Trichloromethane (TCM) and chloromethane (CM), with PIB layer as the sensing element. A new SMFBAR based detector with enhanced sensitivity of 21 kHz/ppm for detection of Tetrachloroethane (PCE) gas has been reported. FEM Modeling has been done on COMSOL Multiphysics software and a resonant frequency of 1.38 GHz has been observed for ideal environment. The sensor was tested for various concentrations ranging from 100 to 1000 ppm of Tetrachloroethane gas.
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fullrecord <record><control><sourceid>iop_cross</sourceid><recordid>TN_cdi_iop_journals_10_1088_2053_1591_aae73a</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>mrxaae73a</sourcerecordid><originalsourceid>FETCH-LOGICAL-c311t-77392f3e9749d0c00f8b26fd127aae976b983668a5a7591d94e27a5eae9cc5c63</originalsourceid><addsrcrecordid>eNp9UMtKAzEUDaJgqd27zEoUHJtMOpPJsi2tFioWH-uQ5tFOmZkMSYr2781YERfi6l7ueXDPAeASozuMimKYoowkOGN4KISmRJyA3s_p9Nd-Dgbe7xBCKWUkS_MeaOezR1hbpauy2UDRKOjLel-JUNoGWgNfHueT8TP0uvHWwfcybOFqMYHCf506TSUO2kET0aCDE3JbWWd12IpGw-vVdHYDN5GtdNCyM70AZ0ZUXg--Zx-8zWev04dk-XS_mI6XiSQYh4RSwlJDNKMjppBEyBTrNDcKpzRGZDRfs4LkeSEyQWMwxUY6IpmOmJSZzEkfoKOvdNZ7pw1vXVkLd-AY8a403rXCu1b4sbQouT1KStvynd27Jj74H_3qD3rtPnjOMUc4Q4TwVhnyCVMCeqk</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>FEM modeling and simulation of SMFBAR sensor with PIB as sensing layer for tetrachloroethane (PCE) gas detection</title><source>IOP Publishing Journals</source><source>IOPscience extra</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>Johar, Arun K ; Patel, Raju ; Periasamy, C ; Agarwal, Ajay ; Boolchandani, D</creator><creatorcontrib>Johar, Arun K ; Patel, Raju ; Periasamy, C ; Agarwal, Ajay ; Boolchandani, D</creatorcontrib><description>This paper represents the design and FEM modeling of solidly mounted film bulk acoustic resonator (SMFBAR) gas sensor, based on ZnO, for Tetrachloroethane (PCE) gas detection. The effect of sensitive polyisobutylene(PIB) layer coating on mass sensitivity has been analyzed along with optimization of the layer thickness. The proposed structure shows good quality factor of 758, at resonance condition, and a coupling coefficient of 7.36% for the piezoelectric layer with 2 m thickness. SMFBAR sensor was tested for detection of various gases such as, Tetrachloroethane (PCE), Trichloroethylene (TCE), Trichloromethane (TCM) and chloromethane (CM), with PIB layer as the sensing element. A new SMFBAR based detector with enhanced sensitivity of 21 kHz/ppm for detection of Tetrachloroethane (PCE) gas has been reported. FEM Modeling has been done on COMSOL Multiphysics software and a resonant frequency of 1.38 GHz has been observed for ideal environment. The sensor was tested for various concentrations ranging from 100 to 1000 ppm of Tetrachloroethane gas.</description><identifier>ISSN: 2053-1591</identifier><identifier>EISSN: 2053-1591</identifier><identifier>DOI: 10.1088/2053-1591/aae73a</identifier><language>eng</language><publisher>IOP Publishing</publisher><subject>finite element method (FEM) ; gas sensor ; piezoelectric ; solidly mounted film bulk acoustic wave resonators (SMFBAR)</subject><ispartof>Materials research express, 2019-01, Vol.6 (1), p.15033</ispartof><rights>2018 IOP Publishing Ltd</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c311t-77392f3e9749d0c00f8b26fd127aae976b983668a5a7591d94e27a5eae9cc5c63</citedby><cites>FETCH-LOGICAL-c311t-77392f3e9749d0c00f8b26fd127aae976b983668a5a7591d94e27a5eae9cc5c63</cites><orcidid>0000-0002-1992-804X ; 0000-0002-3367-9828</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1088/2053-1591/aae73a/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,777,781,27905,27906,38849,53821,53827,53874</link.rule.ids></links><search><creatorcontrib>Johar, Arun K</creatorcontrib><creatorcontrib>Patel, Raju</creatorcontrib><creatorcontrib>Periasamy, C</creatorcontrib><creatorcontrib>Agarwal, Ajay</creatorcontrib><creatorcontrib>Boolchandani, D</creatorcontrib><title>FEM modeling and simulation of SMFBAR sensor with PIB as sensing layer for tetrachloroethane (PCE) gas detection</title><title>Materials research express</title><addtitle>MRX</addtitle><addtitle>Mater. Res. Express</addtitle><description>This paper represents the design and FEM modeling of solidly mounted film bulk acoustic resonator (SMFBAR) gas sensor, based on ZnO, for Tetrachloroethane (PCE) gas detection. The effect of sensitive polyisobutylene(PIB) layer coating on mass sensitivity has been analyzed along with optimization of the layer thickness. The proposed structure shows good quality factor of 758, at resonance condition, and a coupling coefficient of 7.36% for the piezoelectric layer with 2 m thickness. SMFBAR sensor was tested for detection of various gases such as, Tetrachloroethane (PCE), Trichloroethylene (TCE), Trichloromethane (TCM) and chloromethane (CM), with PIB layer as the sensing element. A new SMFBAR based detector with enhanced sensitivity of 21 kHz/ppm for detection of Tetrachloroethane (PCE) gas has been reported. FEM Modeling has been done on COMSOL Multiphysics software and a resonant frequency of 1.38 GHz has been observed for ideal environment. The sensor was tested for various concentrations ranging from 100 to 1000 ppm of Tetrachloroethane gas.</description><subject>finite element method (FEM)</subject><subject>gas sensor</subject><subject>piezoelectric</subject><subject>solidly mounted film bulk acoustic wave resonators (SMFBAR)</subject><issn>2053-1591</issn><issn>2053-1591</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2019</creationdate><recordtype>article</recordtype><recordid>eNp9UMtKAzEUDaJgqd27zEoUHJtMOpPJsi2tFioWH-uQ5tFOmZkMSYr2781YERfi6l7ueXDPAeASozuMimKYoowkOGN4KISmRJyA3s_p9Nd-Dgbe7xBCKWUkS_MeaOezR1hbpauy2UDRKOjLel-JUNoGWgNfHueT8TP0uvHWwfcybOFqMYHCf506TSUO2kET0aCDE3JbWWd12IpGw-vVdHYDN5GtdNCyM70AZ0ZUXg--Zx-8zWev04dk-XS_mI6XiSQYh4RSwlJDNKMjppBEyBTrNDcKpzRGZDRfs4LkeSEyQWMwxUY6IpmOmJSZzEkfoKOvdNZ7pw1vXVkLd-AY8a403rXCu1b4sbQouT1KStvynd27Jj74H_3qD3rtPnjOMUc4Q4TwVhnyCVMCeqk</recordid><startdate>20190101</startdate><enddate>20190101</enddate><creator>Johar, Arun K</creator><creator>Patel, Raju</creator><creator>Periasamy, C</creator><creator>Agarwal, Ajay</creator><creator>Boolchandani, D</creator><general>IOP Publishing</general><scope>AAYXX</scope><scope>CITATION</scope><orcidid>https://orcid.org/0000-0002-1992-804X</orcidid><orcidid>https://orcid.org/0000-0002-3367-9828</orcidid></search><sort><creationdate>20190101</creationdate><title>FEM modeling and simulation of SMFBAR sensor with PIB as sensing layer for tetrachloroethane (PCE) gas detection</title><author>Johar, Arun K ; Patel, Raju ; Periasamy, C ; Agarwal, Ajay ; Boolchandani, D</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c311t-77392f3e9749d0c00f8b26fd127aae976b983668a5a7591d94e27a5eae9cc5c63</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2019</creationdate><topic>finite element method (FEM)</topic><topic>gas sensor</topic><topic>piezoelectric</topic><topic>solidly mounted film bulk acoustic wave resonators (SMFBAR)</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Johar, Arun K</creatorcontrib><creatorcontrib>Patel, Raju</creatorcontrib><creatorcontrib>Periasamy, C</creatorcontrib><creatorcontrib>Agarwal, Ajay</creatorcontrib><creatorcontrib>Boolchandani, D</creatorcontrib><collection>CrossRef</collection><jtitle>Materials research express</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Johar, Arun K</au><au>Patel, Raju</au><au>Periasamy, C</au><au>Agarwal, Ajay</au><au>Boolchandani, D</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>FEM modeling and simulation of SMFBAR sensor with PIB as sensing layer for tetrachloroethane (PCE) gas detection</atitle><jtitle>Materials research express</jtitle><stitle>MRX</stitle><addtitle>Mater. Res. Express</addtitle><date>2019-01-01</date><risdate>2019</risdate><volume>6</volume><issue>1</issue><spage>15033</spage><pages>15033-</pages><issn>2053-1591</issn><eissn>2053-1591</eissn><abstract>This paper represents the design and FEM modeling of solidly mounted film bulk acoustic resonator (SMFBAR) gas sensor, based on ZnO, for Tetrachloroethane (PCE) gas detection. The effect of sensitive polyisobutylene(PIB) layer coating on mass sensitivity has been analyzed along with optimization of the layer thickness. The proposed structure shows good quality factor of 758, at resonance condition, and a coupling coefficient of 7.36% for the piezoelectric layer with 2 m thickness. SMFBAR sensor was tested for detection of various gases such as, Tetrachloroethane (PCE), Trichloroethylene (TCE), Trichloromethane (TCM) and chloromethane (CM), with PIB layer as the sensing element. A new SMFBAR based detector with enhanced sensitivity of 21 kHz/ppm for detection of Tetrachloroethane (PCE) gas has been reported. FEM Modeling has been done on COMSOL Multiphysics software and a resonant frequency of 1.38 GHz has been observed for ideal environment. The sensor was tested for various concentrations ranging from 100 to 1000 ppm of Tetrachloroethane gas.</abstract><pub>IOP Publishing</pub><doi>10.1088/2053-1591/aae73a</doi><tpages>9</tpages><orcidid>https://orcid.org/0000-0002-1992-804X</orcidid><orcidid>https://orcid.org/0000-0002-3367-9828</orcidid></addata></record>
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subjects finite element method (FEM)
gas sensor
piezoelectric
solidly mounted film bulk acoustic wave resonators (SMFBAR)
title FEM modeling and simulation of SMFBAR sensor with PIB as sensing layer for tetrachloroethane (PCE) gas detection
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-19T17%3A58%3A30IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-iop_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=FEM%20modeling%20and%20simulation%20of%20SMFBAR%20sensor%20with%20PIB%20as%20sensing%20layer%20for%20tetrachloroethane%20(PCE)%20gas%20detection&rft.jtitle=Materials%20research%20express&rft.au=Johar,%20Arun%20K&rft.date=2019-01-01&rft.volume=6&rft.issue=1&rft.spage=15033&rft.pages=15033-&rft.issn=2053-1591&rft.eissn=2053-1591&rft_id=info:doi/10.1088/2053-1591/aae73a&rft_dat=%3Ciop_cross%3Emrxaae73a%3C/iop_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true