The structural and electrical properties modulated by excessive Ti substitution in SrTiO3 films

Ti-rich nonstoichiometric SrTiO3 (STO) films are fabricated on (111) Pt/Ti/SiO2/Si substrates by metal organic deposition. X-ray diffraction reveals the structure of the samples. The effect of nonstoichiometry on the electrical properties of the STO films is investigated by leakage current measureme...

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Veröffentlicht in:	Materials research express 2018-03, Vol.5 (3)
Hauptverfasser:	Wang, Xiaofei, Hu, Qiubo, Zhang, Chao, Zang, Guozhong, Wang, Dandan, Zhou, Fengzi, Li, Liben
Format:	Artikel
Sprache:	eng
Schlagworte:	ferroelectricity metal organic deposition self-doping
Online-Zugang:	Volltext
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