Improvising CODAS method functionalized with grey numbers to improve the performance of PVD titanium carbon nitride (TiCN) thin film coating: a novel approach

This experimental study focuses on the deposition of TiCN thin film coating onto a bare p-type silicon substrate using physical vapor deposition (PVD) processes, with varying process parameters. The study employed a design of experiment in accordance with the L 16 orthogonal Array, followed by the i...

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Veröffentlicht in:	Physica scripta 2023-12, Vol.98 (12), p.125928
Hauptverfasser:	Das, Soham, Protim Das, Partha, Ghadai, Ranjan Kr, Guha, Spandan
Format:	Artikel
Sprache:	eng
Schlagworte:	CODAS grey numbers morphology PVD TiCN coating
Online-Zugang:	Volltext
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