Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code

The present work investigates electron transport and heating mechanisms using an ( r ,  z ) particle-in-cell simulation of a typical rf-driven axisymmetric magnetron discharge with a conducting target. Due to a strong geometric asymmetry and a blocking capacitor, the discharge features a large negat...

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Veröffentlicht in:	Plasma sources science & technology 2023-04, Vol.32 (4), p.45008
Hauptverfasser:	Eremin, D, Berger, B, Engel, D, Kallähn, J, Köhn, K, Krüger, D, Xu, L, Oberberg, M, Wölfel, C, Lunze, J, Awakowicz, P, Schulze, J, Brinkmann, R P
Format:	Artikel
Sprache:	eng
Schlagworte:	electron heating electron transport magnetized plasma magnetized rf discharge magnetron
Online-Zugang:	Volltext
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