Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements
The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute et al presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitro...
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| Veröffentlicht in: | Plasma sources science & technology 2021-06, Vol.30 (6), p.65014 |
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| creator | Klute, Michael Kemaneci, Efe Porteanu, Horia-Eugen Stefanović, Ilija Heinrich, Wolfgang Awakowicz, Peter Brinkmann, Ralf Peter |
| description | The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute
et al
presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of
p
= 1000 Pa and a gas temperature of
T
g
= 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of
n
e
≈ 6.4 × 10
18
m
−3
as
E
/
H
-hybridmode with an capacitive and inductive component. |
| doi_str_mv | 10.1088/1361-6595/ac04bc |
| format | Article |
| fullrecord | <record><control><sourceid>iop_cross</sourceid><recordid>TN_cdi_iop_journals_10_1088_1361_6595_ac04bc</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>psstac04bc</sourcerecordid><originalsourceid>FETCH-LOGICAL-c322t-957cccfeaed014f95fb3909f781a5cc536c30eff7674ff4f3f3e59ce5d8b0a723</originalsourceid><addsrcrecordid>eNp1kMFKxDAQhoMoWFfvHvMA1k2apm2OsqgrrHjRmxBm08mS0iYl6a749nZZ8eZpfob5hp-PkFvO7jlrmiUXFc8rqeQSDCu35oxkf6tzkjFViZwVsrgkVyl1jHHeFHVGPl9Di33v_I4GS4EOzjuY9hHnZGL4ggPSNroDeurdFMNuDmMPaQDa4UTBt9SEYYToUvB0CnRASDM-oJ_SNbmw0Ce8-Z0L8vH0-L5a55u355fVwyY3oiimXMnaGGMRsGW8tErarVBM2brhII2RojKCobV1VZfWllZYgVIZlG2zZVAXYkHY6e_cOKWIVo_RDRC_NWf6aEcfVeijCn2yMyN3J8SFUXdhH_1c8P_zH0XiaU4</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>Klute, Michael ; Kemaneci, Efe ; Porteanu, Horia-Eugen ; Stefanović, Ilija ; Heinrich, Wolfgang ; Awakowicz, Peter ; Brinkmann, Ralf Peter</creator><creatorcontrib>Klute, Michael ; Kemaneci, Efe ; Porteanu, Horia-Eugen ; Stefanović, Ilija ; Heinrich, Wolfgang ; Awakowicz, Peter ; Brinkmann, Ralf Peter</creatorcontrib><description>The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute
et al
presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of
p
= 1000 Pa and a gas temperature of
T
g
= 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of
n
e
≈ 6.4 × 10
18
m
−3
as
E
/
H
-hybridmode with an capacitive and inductive component.</description><identifier>ISSN: 0963-0252</identifier><identifier>EISSN: 1361-6595</identifier><identifier>DOI: 10.1088/1361-6595/ac04bc</identifier><identifier>CODEN: PSTEEU</identifier><language>eng</language><publisher>IOP Publishing</publisher><subject>inductively ; microwave ; miniature ; nitrogen ; plasma jet</subject><ispartof>Plasma sources science & technology, 2021-06, Vol.30 (6), p.65014</ispartof><rights>2021 The Author(s). Published by IOP Publishing Ltd</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c322t-957cccfeaed014f95fb3909f781a5cc536c30eff7674ff4f3f3e59ce5d8b0a723</citedby><cites>FETCH-LOGICAL-c322t-957cccfeaed014f95fb3909f781a5cc536c30eff7674ff4f3f3e59ce5d8b0a723</cites><orcidid>0000-0002-8062-896X ; 0000-0002-1652-1287 ; 0000-0001-9472-1041 ; 0000-0002-5540-0947 ; 0000-0002-2581-9894</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1088/1361-6595/ac04bc/pdf$$EPDF$$P50$$Giop$$Hfree_for_read</linktopdf><link.rule.ids>314,776,780,27901,27902,53821,53868</link.rule.ids></links><search><creatorcontrib>Klute, Michael</creatorcontrib><creatorcontrib>Kemaneci, Efe</creatorcontrib><creatorcontrib>Porteanu, Horia-Eugen</creatorcontrib><creatorcontrib>Stefanović, Ilija</creatorcontrib><creatorcontrib>Heinrich, Wolfgang</creatorcontrib><creatorcontrib>Awakowicz, Peter</creatorcontrib><creatorcontrib>Brinkmann, Ralf Peter</creatorcontrib><title>Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements</title><title>Plasma sources science & technology</title><addtitle>PSST</addtitle><addtitle>Plasma Sources Sci. Technol</addtitle><description>The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute
et al
presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of
p
= 1000 Pa and a gas temperature of
T
g
= 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of
n
e
≈ 6.4 × 10
18
m
−3
as
E
/
H
-hybridmode with an capacitive and inductive component.</description><subject>inductively</subject><subject>microwave</subject><subject>miniature</subject><subject>nitrogen</subject><subject>plasma jet</subject><issn>0963-0252</issn><issn>1361-6595</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2021</creationdate><recordtype>article</recordtype><sourceid>O3W</sourceid><recordid>eNp1kMFKxDAQhoMoWFfvHvMA1k2apm2OsqgrrHjRmxBm08mS0iYl6a749nZZ8eZpfob5hp-PkFvO7jlrmiUXFc8rqeQSDCu35oxkf6tzkjFViZwVsrgkVyl1jHHeFHVGPl9Di33v_I4GS4EOzjuY9hHnZGL4ggPSNroDeurdFMNuDmMPaQDa4UTBt9SEYYToUvB0CnRASDM-oJ_SNbmw0Ce8-Z0L8vH0-L5a55u355fVwyY3oiimXMnaGGMRsGW8tErarVBM2brhII2RojKCobV1VZfWllZYgVIZlG2zZVAXYkHY6e_cOKWIVo_RDRC_NWf6aEcfVeijCn2yMyN3J8SFUXdhH_1c8P_zH0XiaU4</recordid><startdate>20210601</startdate><enddate>20210601</enddate><creator>Klute, Michael</creator><creator>Kemaneci, Efe</creator><creator>Porteanu, Horia-Eugen</creator><creator>Stefanović, Ilija</creator><creator>Heinrich, Wolfgang</creator><creator>Awakowicz, Peter</creator><creator>Brinkmann, Ralf Peter</creator><general>IOP Publishing</general><scope>O3W</scope><scope>TSCCA</scope><scope>AAYXX</scope><scope>CITATION</scope><orcidid>https://orcid.org/0000-0002-8062-896X</orcidid><orcidid>https://orcid.org/0000-0002-1652-1287</orcidid><orcidid>https://orcid.org/0000-0001-9472-1041</orcidid><orcidid>https://orcid.org/0000-0002-5540-0947</orcidid><orcidid>https://orcid.org/0000-0002-2581-9894</orcidid></search><sort><creationdate>20210601</creationdate><title>Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements</title><author>Klute, Michael ; Kemaneci, Efe ; Porteanu, Horia-Eugen ; Stefanović, Ilija ; Heinrich, Wolfgang ; Awakowicz, Peter ; Brinkmann, Ralf Peter</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c322t-957cccfeaed014f95fb3909f781a5cc536c30eff7674ff4f3f3e59ce5d8b0a723</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2021</creationdate><topic>inductively</topic><topic>microwave</topic><topic>miniature</topic><topic>nitrogen</topic><topic>plasma jet</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Klute, Michael</creatorcontrib><creatorcontrib>Kemaneci, Efe</creatorcontrib><creatorcontrib>Porteanu, Horia-Eugen</creatorcontrib><creatorcontrib>Stefanović, Ilija</creatorcontrib><creatorcontrib>Heinrich, Wolfgang</creatorcontrib><creatorcontrib>Awakowicz, Peter</creatorcontrib><creatorcontrib>Brinkmann, Ralf Peter</creatorcontrib><collection>IOP Publishing Free Content</collection><collection>IOPscience (Open Access)</collection><collection>CrossRef</collection><jtitle>Plasma sources science & technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Klute, Michael</au><au>Kemaneci, Efe</au><au>Porteanu, Horia-Eugen</au><au>Stefanović, Ilija</au><au>Heinrich, Wolfgang</au><au>Awakowicz, Peter</au><au>Brinkmann, Ralf Peter</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements</atitle><jtitle>Plasma sources science & technology</jtitle><stitle>PSST</stitle><addtitle>Plasma Sources Sci. Technol</addtitle><date>2021-06-01</date><risdate>2021</risdate><volume>30</volume><issue>6</issue><spage>65014</spage><pages>65014-</pages><issn>0963-0252</issn><eissn>1361-6595</eissn><coden>PSTEEU</coden><abstract>The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute
et al
presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of
p
= 1000 Pa and a gas temperature of
T
g
= 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of
n
e
≈ 6.4 × 10
18
m
−3
as
E
/
H
-hybridmode with an capacitive and inductive component.</abstract><pub>IOP Publishing</pub><doi>10.1088/1361-6595/ac04bc</doi><tpages>8</tpages><orcidid>https://orcid.org/0000-0002-8062-896X</orcidid><orcidid>https://orcid.org/0000-0002-1652-1287</orcidid><orcidid>https://orcid.org/0000-0001-9472-1041</orcidid><orcidid>https://orcid.org/0000-0002-5540-0947</orcidid><orcidid>https://orcid.org/0000-0002-2581-9894</orcidid><oa>free_for_read</oa></addata></record> |
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| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | inductively microwave miniature nitrogen plasma jet |
| title | Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements |
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