Experimental and PIC MCC study of electron cooling-re-heating and plasma density decay in low pressure rf ccp argon afterglow

In this work, experimental and theoretical study of pulsed discharge in argon has been carried out. The experimental data on the dynamics of electron density, electron temperature, and plasma potential have been obtained by probe measurements (using hairpin and Langmuir probes) in the afterglow betw...

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Veröffentlicht in:	Plasma sources science & technology 2020-01, Vol.29 (1), p.15015
Hauptverfasser:	Proshina, O V, Rakhimova, T V, Kovalev, A S, Vasilieva, A N, Zotovich, A I, Zyryanov, S M, Rakhimov, A T
Format:	Artikel
Sprache:	eng
Schlagworte:	argon hairpin probe langmuir probe PIC MC pulsed plasma rf ccp
Online-Zugang:	Volltext
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