Characterization of inductively coupled plasma generated by a quadruple antenna

The results of the characterization of large-scale RF plasma for studying nonlinear interaction with a high-power (∼400 MW) short duration (∼0.8 ns) microwave (∼10 GHz) beam are presented. The plasma was generated inside a Pyrex tube 80 cm in length and 25 cm in diameter filled by either Ar or He ga...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Plasma sources science & technology 2017-01, Vol.26 (2), p.25005
Hauptverfasser: Shafir, G, Zolotukhin, D, Godyak, V, Shlapakovski, A, Gleizer, S, Slutsker, Ya, Gad, R, Bernshtam, V, Ralchenko, Yu, Krasik, Ya E
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue 2
container_start_page 25005
container_title Plasma sources science & technology
container_volume 26
creator Shafir, G
Zolotukhin, D
Godyak, V
Shlapakovski, A
Gleizer, S
Slutsker, Ya
Gad, R
Bernshtam, V
Ralchenko, Yu
Krasik, Ya E
description The results of the characterization of large-scale RF plasma for studying nonlinear interaction with a high-power (∼400 MW) short duration (∼0.8 ns) microwave (∼10 GHz) beam are presented. The plasma was generated inside a Pyrex tube 80 cm in length and 25 cm in diameter filled by either Ar or He gas at a pressure in the range 1.3-13 Pa using a 2 MHz RF generator with a matching system and a quadruple antenna. Good matching was obtained between the plasma parameters, which were determined using different methods including a movable Langmuir probe, microwave cut-off, interferometry, and optical emission spectroscopy. It was shown that, depending on the gas pressure and RF power delivered to the antenna, the plasma density and electron temperature can be controlled in the range 1 × 1010-5 × 1012 cm−3 and 1-3.5 eV, respectively. The plasma density was found to be uniform in terms of axial (∼60 cm) and radial (∼10 cm) dimensions. Further, it was also shown that the application of the quadruple antenna, with resonating capacitors inserted in its arms, decreases the capacitive coupling of the antenna and the plasma as well as the RF power loss along the antenna. These features make this plasma source suitable for microwave plasma wake field experiments.
doi_str_mv 10.1088/1361-6595/aa5300
format Article
fullrecord <record><control><sourceid>iop_cross</sourceid><recordid>TN_cdi_iop_journals_10_1088_1361_6595_aa5300</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>psstaa5300</sourcerecordid><originalsourceid>FETCH-LOGICAL-c307t-c77106f6a0d3007147a3895b4317d114cf022096aea79ddd3390e157668375673</originalsourceid><addsrcrecordid>eNp1kMFLwzAUh4MoOKd3j8GzdUmzJO1Rhk5hsIuew1uSuowuqUkqzL_eloo3Tw9-fL_Hex9Ct5Q8UFJVC8oELQSv-QKAM0LO0OwvOkczUgtWkJKXl-gqpQMhlFalnKHtag8RdLbRfUN2wePQYOdNr7P7su0J69B3rTW4ayEdAX9YbyPkIdidMODPHkwcAQw-W-_hGl000CZ78zvn6P356W31Umy269fV46bQjMhcaCkpEY0AYoZbJV1KYFXNd0tGpaF0qRtSlsPNYEHWxhjGamIpl0JUTHIh2RzdTXtDyk4l7bLVex28tzoryhnnJR8gMkE6hpSibVQX3RHiSVGiRmtqVKRGRWqyNlTup4oLnTqEPvrhi__xH50lbHA</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Characterization of inductively coupled plasma generated by a quadruple antenna</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>Shafir, G ; Zolotukhin, D ; Godyak, V ; Shlapakovski, A ; Gleizer, S ; Slutsker, Ya ; Gad, R ; Bernshtam, V ; Ralchenko, Yu ; Krasik, Ya E</creator><creatorcontrib>Shafir, G ; Zolotukhin, D ; Godyak, V ; Shlapakovski, A ; Gleizer, S ; Slutsker, Ya ; Gad, R ; Bernshtam, V ; Ralchenko, Yu ; Krasik, Ya E ; Univ. of Michigan, Ann Arbor, MI (United States)</creatorcontrib><description>The results of the characterization of large-scale RF plasma for studying nonlinear interaction with a high-power (∼400 MW) short duration (∼0.8 ns) microwave (∼10 GHz) beam are presented. The plasma was generated inside a Pyrex tube 80 cm in length and 25 cm in diameter filled by either Ar or He gas at a pressure in the range 1.3-13 Pa using a 2 MHz RF generator with a matching system and a quadruple antenna. Good matching was obtained between the plasma parameters, which were determined using different methods including a movable Langmuir probe, microwave cut-off, interferometry, and optical emission spectroscopy. It was shown that, depending on the gas pressure and RF power delivered to the antenna, the plasma density and electron temperature can be controlled in the range 1 × 1010-5 × 1012 cm−3 and 1-3.5 eV, respectively. The plasma density was found to be uniform in terms of axial (∼60 cm) and radial (∼10 cm) dimensions. Further, it was also shown that the application of the quadruple antenna, with resonating capacitors inserted in its arms, decreases the capacitive coupling of the antenna and the plasma as well as the RF power loss along the antenna. These features make this plasma source suitable for microwave plasma wake field experiments.</description><identifier>ISSN: 0963-0252</identifier><identifier>ISSN: 1361-6595</identifier><identifier>EISSN: 1361-6595</identifier><identifier>DOI: 10.1088/1361-6595/aa5300</identifier><identifier>CODEN: PSTEEU</identifier><language>eng</language><publisher>United States: IOP Publishing</publisher><subject>inductive coupling ; Langmuir probe diagnostics ; microwave interferometry ; Physics ; RF plasma ; spectroscopy</subject><ispartof>Plasma sources science &amp; technology, 2017-01, Vol.26 (2), p.25005</ispartof><rights>2017 IOP Publishing Ltd</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c307t-c77106f6a0d3007147a3895b4317d114cf022096aea79ddd3390e157668375673</citedby><cites>FETCH-LOGICAL-c307t-c77106f6a0d3007147a3895b4317d114cf022096aea79ddd3390e157668375673</cites><orcidid>0000-0002-5206-9486 ; 0000000252069486</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1088/1361-6595/aa5300/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>230,315,782,786,887,27931,27932,53853,53900</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/1535525$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Shafir, G</creatorcontrib><creatorcontrib>Zolotukhin, D</creatorcontrib><creatorcontrib>Godyak, V</creatorcontrib><creatorcontrib>Shlapakovski, A</creatorcontrib><creatorcontrib>Gleizer, S</creatorcontrib><creatorcontrib>Slutsker, Ya</creatorcontrib><creatorcontrib>Gad, R</creatorcontrib><creatorcontrib>Bernshtam, V</creatorcontrib><creatorcontrib>Ralchenko, Yu</creatorcontrib><creatorcontrib>Krasik, Ya E</creatorcontrib><creatorcontrib>Univ. of Michigan, Ann Arbor, MI (United States)</creatorcontrib><title>Characterization of inductively coupled plasma generated by a quadruple antenna</title><title>Plasma sources science &amp; technology</title><addtitle>PSST</addtitle><addtitle>Plasma Sources Sci. Technol</addtitle><description>The results of the characterization of large-scale RF plasma for studying nonlinear interaction with a high-power (∼400 MW) short duration (∼0.8 ns) microwave (∼10 GHz) beam are presented. The plasma was generated inside a Pyrex tube 80 cm in length and 25 cm in diameter filled by either Ar or He gas at a pressure in the range 1.3-13 Pa using a 2 MHz RF generator with a matching system and a quadruple antenna. Good matching was obtained between the plasma parameters, which were determined using different methods including a movable Langmuir probe, microwave cut-off, interferometry, and optical emission spectroscopy. It was shown that, depending on the gas pressure and RF power delivered to the antenna, the plasma density and electron temperature can be controlled in the range 1 × 1010-5 × 1012 cm−3 and 1-3.5 eV, respectively. The plasma density was found to be uniform in terms of axial (∼60 cm) and radial (∼10 cm) dimensions. Further, it was also shown that the application of the quadruple antenna, with resonating capacitors inserted in its arms, decreases the capacitive coupling of the antenna and the plasma as well as the RF power loss along the antenna. These features make this plasma source suitable for microwave plasma wake field experiments.</description><subject>inductive coupling</subject><subject>Langmuir probe diagnostics</subject><subject>microwave interferometry</subject><subject>Physics</subject><subject>RF plasma</subject><subject>spectroscopy</subject><issn>0963-0252</issn><issn>1361-6595</issn><issn>1361-6595</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><recordid>eNp1kMFLwzAUh4MoOKd3j8GzdUmzJO1Rhk5hsIuew1uSuowuqUkqzL_eloo3Tw9-fL_Hex9Ct5Q8UFJVC8oELQSv-QKAM0LO0OwvOkczUgtWkJKXl-gqpQMhlFalnKHtag8RdLbRfUN2wePQYOdNr7P7su0J69B3rTW4ayEdAX9YbyPkIdidMODPHkwcAQw-W-_hGl000CZ78zvn6P356W31Umy269fV46bQjMhcaCkpEY0AYoZbJV1KYFXNd0tGpaF0qRtSlsPNYEHWxhjGamIpl0JUTHIh2RzdTXtDyk4l7bLVex28tzoryhnnJR8gMkE6hpSibVQX3RHiSVGiRmtqVKRGRWqyNlTup4oLnTqEPvrhi__xH50lbHA</recordid><startdate>20170117</startdate><enddate>20170117</enddate><creator>Shafir, G</creator><creator>Zolotukhin, D</creator><creator>Godyak, V</creator><creator>Shlapakovski, A</creator><creator>Gleizer, S</creator><creator>Slutsker, Ya</creator><creator>Gad, R</creator><creator>Bernshtam, V</creator><creator>Ralchenko, Yu</creator><creator>Krasik, Ya E</creator><general>IOP Publishing</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope><orcidid>https://orcid.org/0000-0002-5206-9486</orcidid><orcidid>https://orcid.org/0000000252069486</orcidid></search><sort><creationdate>20170117</creationdate><title>Characterization of inductively coupled plasma generated by a quadruple antenna</title><author>Shafir, G ; Zolotukhin, D ; Godyak, V ; Shlapakovski, A ; Gleizer, S ; Slutsker, Ya ; Gad, R ; Bernshtam, V ; Ralchenko, Yu ; Krasik, Ya E</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c307t-c77106f6a0d3007147a3895b4317d114cf022096aea79ddd3390e157668375673</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><topic>inductive coupling</topic><topic>Langmuir probe diagnostics</topic><topic>microwave interferometry</topic><topic>Physics</topic><topic>RF plasma</topic><topic>spectroscopy</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Shafir, G</creatorcontrib><creatorcontrib>Zolotukhin, D</creatorcontrib><creatorcontrib>Godyak, V</creatorcontrib><creatorcontrib>Shlapakovski, A</creatorcontrib><creatorcontrib>Gleizer, S</creatorcontrib><creatorcontrib>Slutsker, Ya</creatorcontrib><creatorcontrib>Gad, R</creatorcontrib><creatorcontrib>Bernshtam, V</creatorcontrib><creatorcontrib>Ralchenko, Yu</creatorcontrib><creatorcontrib>Krasik, Ya E</creatorcontrib><creatorcontrib>Univ. of Michigan, Ann Arbor, MI (United States)</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Plasma sources science &amp; technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Shafir, G</au><au>Zolotukhin, D</au><au>Godyak, V</au><au>Shlapakovski, A</au><au>Gleizer, S</au><au>Slutsker, Ya</au><au>Gad, R</au><au>Bernshtam, V</au><au>Ralchenko, Yu</au><au>Krasik, Ya E</au><aucorp>Univ. of Michigan, Ann Arbor, MI (United States)</aucorp><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Characterization of inductively coupled plasma generated by a quadruple antenna</atitle><jtitle>Plasma sources science &amp; technology</jtitle><stitle>PSST</stitle><addtitle>Plasma Sources Sci. Technol</addtitle><date>2017-01-17</date><risdate>2017</risdate><volume>26</volume><issue>2</issue><spage>25005</spage><pages>25005-</pages><issn>0963-0252</issn><issn>1361-6595</issn><eissn>1361-6595</eissn><coden>PSTEEU</coden><abstract>The results of the characterization of large-scale RF plasma for studying nonlinear interaction with a high-power (∼400 MW) short duration (∼0.8 ns) microwave (∼10 GHz) beam are presented. The plasma was generated inside a Pyrex tube 80 cm in length and 25 cm in diameter filled by either Ar or He gas at a pressure in the range 1.3-13 Pa using a 2 MHz RF generator with a matching system and a quadruple antenna. Good matching was obtained between the plasma parameters, which were determined using different methods including a movable Langmuir probe, microwave cut-off, interferometry, and optical emission spectroscopy. It was shown that, depending on the gas pressure and RF power delivered to the antenna, the plasma density and electron temperature can be controlled in the range 1 × 1010-5 × 1012 cm−3 and 1-3.5 eV, respectively. The plasma density was found to be uniform in terms of axial (∼60 cm) and radial (∼10 cm) dimensions. Further, it was also shown that the application of the quadruple antenna, with resonating capacitors inserted in its arms, decreases the capacitive coupling of the antenna and the plasma as well as the RF power loss along the antenna. These features make this plasma source suitable for microwave plasma wake field experiments.</abstract><cop>United States</cop><pub>IOP Publishing</pub><doi>10.1088/1361-6595/aa5300</doi><tpages>13</tpages><orcidid>https://orcid.org/0000-0002-5206-9486</orcidid><orcidid>https://orcid.org/0000000252069486</orcidid></addata></record>
fulltext fulltext
identifier ISSN: 0963-0252
ispartof Plasma sources science & technology, 2017-01, Vol.26 (2), p.25005
issn 0963-0252
1361-6595
1361-6595
language eng
recordid cdi_iop_journals_10_1088_1361_6595_aa5300
source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects inductive coupling
Langmuir probe diagnostics
microwave interferometry
Physics
RF plasma
spectroscopy
title Characterization of inductively coupled plasma generated by a quadruple antenna
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-04T22%3A02%3A52IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-iop_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Characterization%20of%20inductively%20coupled%20plasma%20generated%20by%20a%20quadruple%20antenna&rft.jtitle=Plasma%20sources%20science%20&%20technology&rft.au=Shafir,%20G&rft.aucorp=Univ.%20of%20Michigan,%20Ann%20Arbor,%20MI%20(United%20States)&rft.date=2017-01-17&rft.volume=26&rft.issue=2&rft.spage=25005&rft.pages=25005-&rft.issn=0963-0252&rft.eissn=1361-6595&rft.coden=PSTEEU&rft_id=info:doi/10.1088/1361-6595/aa5300&rft_dat=%3Ciop_cross%3Epsstaa5300%3C/iop_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true