Direct-write formation of integrated bottom contacts to laser-induced graphene-like carbon

We report a simple, scalable two-step method for direct-write laser fabrication of 3D, porous graphene-like carbon electrodes from polyimide films with integrated contact plugs to underlying metal layers (Au or Ni). Irradiation at high average CO 2 laser power (30 W) and low scan speed (∼18 mm s) −1...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Nanotechnology 2022-10, Vol.33 (40), p.405204
Hauptverfasser:	Murray, Richard, O’Neill, Orla, Vaughan, Eoghan, Iacopino, Daniela, Blake, Alan, Lyons, Colin, O’Connell, Dan, O’Brien, Joe, Quinn, Aidan J
Format:	Artikel
Sprache:	eng
Schlagworte:	additive manufacture contact resistance electrochemistry laser-induced graphene
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!