Direct observation of surface charge redistribution in active nanoscale conducting channels by Kelvin Probe Force Microscopy

Surface-exposed uniformly doped silicon-on-insulator channels are fabricated to evaluate the accuracy of Kelvin Probe Force Microscopy (KPFM) measured surface potential and reveals the role of surface charge on the exposed channel operated in the ambient environment. First, the quality of the potent...

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Veröffentlicht in:	Nanotechnology 2021-08, Vol.32 (32), p.325206
Hauptverfasser:	Ye, Sheng, Yan, Xingzhao, Husain, Muhammad Khaled, Saito, Shinichi, de Groot, C H (Kees), Tsuchiya, Yoshishige
Format:	Artikel
Sprache:	eng
Schlagworte:	electric field excess potential bending KPFM local resistivity silicon on insulator surface charge vacuum
Online-Zugang:	Volltext
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