The impact of O2/Ar ratio on morphology and functional properties in reactive sputtering of metal oxide thin films

Morphology is a critical parameter for various thin film applications, influencing properties like wetting, catalytic performance and sensing efficiency. In this work, we report on the impact of oxygen partial flow on the morphology of ceramic thin films deposited by pulsed DC reactive magnetron spu...

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Veröffentlicht in:	Nanotechnology 2019-03, Vol.30 (23)
Hauptverfasser:	Vahl, A, Dittmann, J, Jetter, J, Veziroglu, S, Shree, S, Ababii, N, Lupan, O, Aktas, O C, Strunskus, T, Quandt, E, Adelung, R, Sharma, S K, Faupel, F
Format:	Artikel
Sprache:	eng
Schlagworte:	crack network gas sensing photocatalysis sputter deposition thin film
Online-Zugang:	Volltext
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