Novel nanofluidic chemical cells based on self-assembled solid-state SiO2 nanotubes

Novel nanofluidic chemical cells based on self-assembled solid-state SiO2 nanotubes on silicon-on-insulator (SOI) substrate have been successfully fabricated and characterized. The vertical SiO2 nanotubes with a smooth cavity are built from Si nanowires which were epitaxially grown on the SOI substr...

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Veröffentlicht in:	Nanotechnology 2017-10, Vol.28 (43), p.435601-435601
Hauptverfasser:	Zhu, Hao, Li, Haitao, Robertson, Joseph W F, Balijepalli, Arvind, Krylyuk, Sergiy, Davydov, Albert V, Kasianowicz, John J, Suehle, John S, Li, Qiliang
Format:	Artikel
Sprache:	eng
Schlagworte:	fabrication nanofluidic cell nanotube self-assembly silicon-on-insulator SiO solid-state
Online-Zugang:	Volltext
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